Annealing effect on optical and electronic properties of silicon rich amorphous silicon-carbide films

Shuxin LI; Yunjun RUI; Yunqing CAO; Jun XU; Kunji CHEN

doi:10.1007/s12200-012-0196-7

Frontiers of Optoelectronics, Volume. 5, Issue 1, 107(2012)

Annealing effect on optical and electronic properties of silicon rich amorphous silicon-carbide films

Shuxin LI¹, Yunjun RUI^1,2, Yunqing CAO¹, Jun XU^1、*, and Kunji CHEN¹

¹Nanjing National Laboratory of Microstructures, School of Electronic Science and Engineering, School of Physics, Nanjing University, Nanjing 210093, China

²Department of Applied Physics, Nanjing University of Technology, Nanjing 210009, China

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Shuxin LI, Yunjun RUI, Yunqing CAO, Jun XU, Kunji CHEN. Annealing effect on optical and electronic properties of silicon rich amorphous silicon-carbide films[J]. Frontiers of Optoelectronics, 2012, 5(1): 107

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Paper Information

Received: Sep. 13, 2011

Accepted: Nov. 15, 2011

Published Online: Sep. 10, 2012

The Author Email: Jun XU (junxu@nju.edu.cn)

DOI:10.1007/s12200-012-0196-7

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