INFRARED, Volume. 44, Issue 2, 24(2023)

Review of GaAs-Based VCSEL Dry Etching Technology

Hao-xuan FAN, Wen-bo ZHANG, Mu-ze LI, and Yong-qin HAO*
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    FAN Hao-xuan, ZHANG Wen-bo, LI Mu-ze, HAO Yong-qin. Review of GaAs-Based VCSEL Dry Etching Technology[J]. INFRARED, 2023, 44(2): 24

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    Paper Information

    Received: Oct. 11, 2022

    Accepted: --

    Published Online: Mar. 17, 2023

    The Author Email: HAO Yong-qin (hyq72081220@aliyun.com)

    DOI:10.3969/j.issn.1672-8785.2023.02.005

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