INFRARED, Volume. 44, Issue 2, 24(2023)
Review of GaAs-Based VCSEL Dry Etching Technology
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FAN Hao-xuan, ZHANG Wen-bo, LI Mu-ze, HAO Yong-qin. Review of GaAs-Based VCSEL Dry Etching Technology[J]. INFRARED, 2023, 44(2): 24
Received: Oct. 11, 2022
Accepted: --
Published Online: Mar. 17, 2023
The Author Email: HAO Yong-qin (hyq72081220@aliyun.com)