Acta Physica Sinica, Volume. 69, Issue 10, 108103-1(2020)

Thick yet tough TiN coatings deposited by filter cathode vacuum arc technology

Zhi-Qiang Zhang1,2, Bin Liao1,2、*, Yi-Xiang Ou2, Feng-Shou Zhang1,2, Xu Zhang1,2, Yong-Qing Shen1,2, Shu-Nian Chen1,2, Qing-Song Hua1,2, Guang-Yu He3, and Xiao-Ping Ouyang1
Author Affiliations
  • 1College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China
  • 2Beijing Radiation Center, Beijing 100875, China
  • 3Science and Technology on Plasma Dynamics Laboratory, Air Force Engineering University, Xi’an 710038, China
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    References(40)

    [34] Shulga Y U M, Troitskii V N, Aivazov M I, Borodko Y U G[J]. Zh. Neorg. Khim., 21, 2621(1976).

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    Zhi-Qiang Zhang, Bin Liao, Yi-Xiang Ou, Feng-Shou Zhang, Xu Zhang, Yong-Qing Shen, Shu-Nian Chen, Qing-Song Hua, Guang-Yu He, Xiao-Ping Ouyang. Thick yet tough TiN coatings deposited by filter cathode vacuum arc technology[J]. Acta Physica Sinica, 2020, 69(10): 108103-1

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    Paper Information

    Received: Jan. 6, 2020

    Accepted: --

    Published Online: Nov. 30, 2020

    The Author Email:

    DOI:10.7498/aps.69.20200036

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