Infrared and Laser Engineering, Volume. 50, Issue 10, 20210527(2021)

Shack-Hartmann scanning and stiching detection plane mirror (Invited)

Jing Wang1,2, Xiaokun Wang1,2, Haixiang Hu1,2, Lingzhong Li1,2, and Hang Su1,2
Author Affiliations
  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
  • 2Univesity of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(15)
    Schematic diagram of Shack-Hartmann scanning and splicing plane mirror
    Schematic diagram of sub-aperture center location planning
    Fourier optical physics in the imaging of a single microlens
    Simulation results of single microlens imaging
    Simulation results of microlens array imaging
    Full caliber simulation results. (a) Added wave aberrations; (b) Stitching simulation results; (c) Result error
    Shack-Hartmann scanning and splicing detection system
    Plane mirror edge position. (a) Uupper edge;(b) Lower edge;(c) Left edge; (d) Right edge
    Fine alignment process. (a) Misalignment;(b) Alignment
    Full caliber slope test results. (a) Slope in the xdirection; (b) Slope in the y direction
    (a) Full aperture surface; (b) Interferometer test results
    Residual distribution
    • Table 1. Simulation parameters

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      Table 1. Simulation parameters

      ParameterValue
      Microlens array diameter/mm14.61
      Mirror radius /mm25
      Number of subaperture37
      Wave length/nm635
    • Table 2. Moving platform range and accuracy

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      Table 2. Moving platform range and accuracy

      ParameterValueAccuracy
      x /mm 1 0000.01
      y /mm 5000.01
      z /mm 8000.02
      A90 °4″
      C360 °10″
    • Table 3. Experiment parameters

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      Table 3. Experiment parameters

      ParameterValue
      Detection beam aperture /mm14.6
      Mirror diameter /mm150
      Sampling density17×17
      Scanning step /mm9.1
      Wave length/nm635
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    Jing Wang, Xiaokun Wang, Haixiang Hu, Lingzhong Li, Hang Su. Shack-Hartmann scanning and stiching detection plane mirror (Invited)[J]. Infrared and Laser Engineering, 2021, 50(10): 20210527

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    Paper Information

    Category: Special issue—Advanced design and manufacturing of optical system

    Received: Jul. 30, 2021

    Accepted: --

    Published Online: Dec. 7, 2021

    The Author Email:

    DOI:10.3788/IRLA20210527

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