Analysis of High-Resolution X-Ray Diffraction for InAs/GaSb Superlattice

Qiang Zhang; Dan Fang; Xiaoyu Qi; Han Li

doi:10.3788/LOP202158.2316004

Laser & Optoelectronics Progress, Volume. 58, Issue 23, 2316004(2021)

Analysis of High-Resolution X-Ray Diffraction for InAs/GaSb Superlattice

Qiang Zhang¹, Dan Fang^2、*, Xiaoyu Qi¹, and Han Li¹

¹Department of Optical and Electronical Science, Changchun College of Electronic Technology, Changchun , Jilin 130022, China

²State Key Laboratory of High Power Semiconductor Laser, Changchun University of Science and Technology, Changchun , Jilin 130022, China

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Figures & Tables(8)

Fig. 1. Structural diagrams of the first group of samples with the same thickness and different periods. (a) Sample 1; (b) sample 2

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Fig. 2. Structural diagrams of the second group of samples with the same thickness and different periods. (a) Sample 3; (b) sample 4

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Fig. 3. Simulation of samples. (a) Sample 1; (b) sample 2; (c) sample 3; (d) sample 4

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Fig. 4. HRXRD curves of the first group of samples. (a) Sample 1; (b) sample 2

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Fig. 5. AFM morphologies of the first group of samples. (a) Sample 1; (b) sample 2

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Fig. 6. HRXRD curves of the second group of samples. (a) Sample 3; (b) sample 4

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Fig. 7. AFM morphologies of the second group of samples. (a) Sample 3; (b) sample 4

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Table 1. Calculation parameters for two groups of samples
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Table 1. Calculation parameters for two groups of samples
No. FWHM /（°） D /nm ε /% RMS of surface roughness /nm
Sample 1 0.150 5.45 0.56 0.45
Sample 2 0.027 5.59 0.43 0.31
Sample 3 0.112 5.17 0.64 0.81
Sample 4 0.085 6.23 0.67 1.22

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Qiang Zhang, Dan Fang, Xiaoyu Qi, Han Li. Analysis of High-Resolution X-Ray Diffraction for InAs/GaSb Superlattice[J]. Laser & Optoelectronics Progress, 2021, 58(23): 2316004

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