Fig. 1. Preparation of InAs / InGaAsSb superlattice mesa structure and ALD-Al₂O₃ passivation process

Fig. 2. X-ray diffraction patterns of InAs/InGaAsSb superlattice materials

Fig. 3. AFM scanning images before and after passivation

Fig. 4. X-ray photoelectron spectroscopy of As 3d element before and after etching passivation

Fig. 5. Five days spectral comparison between untreated and passivated samples

Fig. 6. Temperature dependent spectra of untreated and passivated samples

Fig. 7. Fitting diagram of power dependence before and after passivation

Fig. 8. Temperature dependence spectra of untreated and passivated samples

Fig. 9. Fitting values of untreated and passivated samples