Acta Optica Sinica, Volume. 27, Issue 4, 668(2007)
Vertical Scanning White-Light Interferometry for Dimensional Characterization of Microelectromechanical System Devices
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Vertical Scanning White-Light Interferometry for Dimensional Characterization of Microelectromechanical System Devices[J]. Acta Optica Sinica, 2007, 27(4): 668
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