Opto-Electronic Engineering, Volume. 36, Issue 1, 93(2009)
Design of Spherical Surface Imaging Projection Lithography Lens
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ZHAO Li-xin, ZHANG Yu-dong, WANG Jian, DAI Yun, GAO Hong-tao, DONG Xiao-chun, RAO Xue-jun. Design of Spherical Surface Imaging Projection Lithography Lens[J]. Opto-Electronic Engineering, 2009, 36(1): 93
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Received: Jul. 8, 2008
Accepted: --
Published Online: Oct. 9, 2009
The Author Email: Li-xin ZHAO (zhaolixin@ioe.ac.cn)
CSTR:32186.14.
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