Opto-Electronic Engineering, Volume. 36, Issue 1, 93(2009)
Design of Spherical Surface Imaging Projection Lithography Lens
Referring to the fabrication characteristics of three-dimensional continuous microstructure on the intraocular lens or contact lens, the method for designing spherical surface imaging projection lithography lens was introduced based on the spatial optical modulator such as Digital Mirror Device (DMD). According to characteristics of the projection lens, the image-surface was spherical, and the field curvature was corrected by the negative lens. According to the diffraction theory, the numerical aperture was optimized in order to eliminate the DMD structure effect. Integrated with the grid of DMD imaging, projection lens were simulated, designed and optimized by using ZEMAX optical design software, and the optimized results were analyzed .For the designed example, its working wavelength is g-line (436 nm), radical curvature of imaging surface is 22.5 mm, imaging area is Ф6 mm, numerical aperture NA=0.1, MTF>0.8 at the resolution of 7.8 μm(64 lp/mm), and its distortion <±0.05%.
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ZHAO Li-xin, ZHANG Yu-dong, WANG Jian, DAI Yun, GAO Hong-tao, DONG Xiao-chun, RAO Xue-jun. Design of Spherical Surface Imaging Projection Lithography Lens[J]. Opto-Electronic Engineering, 2009, 36(1): 93
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Received: Jul. 8, 2008
Accepted: --
Published Online: Oct. 9, 2009
The Author Email: Li-xin ZHAO (zhaolixin@ioe.ac.cn)
CSTR:32186.14.