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Acta Optica Sinica, Volume. 37, Issue 12, 1212001(2017)

Study of Drift Error and Its Compensation Method in Absolute Distance Measurement by Optical Frequency Scanning Interferometry

Yaya Zhang, Yin Guo*, Yongjie Ren, Yue Shang, Yang Liu, and Jigui Zhu
Author Affiliations
  • State Key Laboratory of Precision Measuring Technology & Instruments, College of Precision Instrument and Opto-Electronic Engineering, Tianjin University, Tianjin 300072, China
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    Figures&Tables (8)
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    References (21)
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    Figures & Tables(8)
    Schematic of OFSI distance measurement principle

    Fig. 1. Schematic of OFSI distance measurement principle

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    Variation curve of optical frequency of reference and measurement beam versus time

    Fig. 2. Variation curve of optical frequency of reference and measurement beam versus time

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    Scanning curve of optical frequency triangular wave

    Fig. 3. Scanning curve of optical frequency triangular wave

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    Spectrogram of interference signal

    Fig. 4. Spectrogram of interference signal

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    Schematic of OFSI absolute distance measurement experiment principle

    Fig. 5. Schematic of OFSI absolute distance measurement experiment principle

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    10 times measurement result of the measured target at the distance of 3615.47 mm

    Fig. 6. 10 times measurement result of the measured target at the distance of 3615.47 mm

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    Standard deviation of measurement at different measurement positions with distance of 50 mm

    Fig. 7. Standard deviation of measurement at different measurement positions with distance of 50 mm

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    Residual error of the system (a) before and (b) after compensation

    Fig. 8. Residual error of the system (a) before and (b) after compensation

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    Yaya Zhang, Yin Guo, Yongjie Ren, Yue Shang, Yang Liu, Jigui Zhu. Study of Drift Error and Its Compensation Method in Absolute Distance Measurement by Optical Frequency Scanning Interferometry[J]. Acta Optica Sinica, 2017, 37(12): 1212001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 5, 2017

    Accepted: --

    Published Online: Sep. 6, 2018

    The Author Email: Yin Guo (yin_guo@tju.edu.cn)

    DOI:10.3788/AOS201737.1212001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology