Laser & Optoelectronics Progress, Volume. 62, Issue 3, 0312008(2025)

Micro-Displacement Measurement System Based on Optical Fiber Mach-Zehnder Interferometry

Wen Pan1、*, Xiaojun Feng1, Xingyu Liu2, and Xiongxing Zhang2
Author Affiliations
  • 1Xi'an Modern Chemistry Research Institute, Xi'an 710065, Shaanxi , China
  • 2School of Opto-Electronical Engineering, Xi'an Technological University, Xi'an 710021, Shaanxi , China
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    This study investigates an optical fiber Mach-Zehnder interferometric measurement system for measuring the micro-displacement of a target object. The Mach-Zehnder interferometer structure is used to build a heterodyne laser interferometric optical path. In addition, an acousto-optic frequency shifter is used to modulate the frequency of the reference light, and a photodetector is used to interfere with the measurement light containing the displacement information of the object. To solve the problem of frequency drift of the acousto-optic modulator, the radio-frequency (RF) signal of the modulator is taken as the reference signal. Next, a frequency drift is introduced into the measured and reference signals to give them the same frequency shift error. During phase demodulation of the two signals, the frequency shift errors cancel each other out. The signal demodulation uses a correlation phase identification algorithm that can determine the lead-lag relationship of the signals, and the displacement and direction information of the object is obtained. Experimental results show that in the displacement range of ±25 μm, the maximum and minimum relative errors of displacement are 0.78% and 0.145%, respectively, the fitting coefficient for the linear fit R2 is 0.9999, and the displacement consistency error is less than 0.033 μm. The experiments show that the measurement system has good measurement accuracy and stability.

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    Wen Pan, Xiaojun Feng, Xingyu Liu, Xiongxing Zhang. Micro-Displacement Measurement System Based on Optical Fiber Mach-Zehnder Interferometry[J]. Laser & Optoelectronics Progress, 2025, 62(3): 0312008

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Apr. 29, 2024

    Accepted: Jun. 17, 2024

    Published Online: Feb. 10, 2025

    The Author Email:

    DOI:10.3788/LOP241192

    CSTR:32186.14.LOP241192

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