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Acta Optica Sinica, Volume. 18, Issue 6, 688(1998)

Application of Point Diffraction Interferometer in Scanning Force Microscope

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Application of Point Diffraction Interferometer in Scanning Force Microscope[J]. Acta Optica Sinica, 1998, 18(6): 688

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    Paper Information

    Category: Optical Design and Fabrication

    Received: May. 2, 1997

    Accepted: --

    Published Online: Oct. 18, 2006

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology