Evaluation of efficiency for silicon wafer cleaning by image processing

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Optics and Precision Engineering, Volume. 15, Issue 8, 1263(2007)

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

show less

Abstract Get PDF(in Chinese)

References(6)

[1] [1] ANDREW C T,HEE K P,COSTAS P G.Laser cleaning of surface contaminants[J].Applied Surface Science,1998,127(129):721-725.

[4] [4] MITTAL K L.Particles on Surfaces:Ⅲ[M].New York:Plenum Press,1991.

[5] [5] SONG W D,HONG M H,ZHANG L,et al..Laser cleaning technology and its application[J].SPIE,2002,4426:280-283.

[6] [6] FERNANDES A,KANE D.Dry laser cleaning threshold fluency-How can it be measured accurately[J].SPIE,2002,4426:290-295.

[10] [10] NEBES P,ARRONTE M,VILAR R,et al..KrF excimer laser dry and steam cleaning of silicon surfaces with metallic particulate contaminants[J].Appl.Phys.,2002(74):191-199.

[12] [12] RAFAEL C G,RICHARD E W.Digital Image Processing (second edition)[M].Beijing:Publishing House of Electronics Industry,2002.

CLP Journals

[1] Xue Yafei, Wang Wei, Wang Xuefeng, Wang Junlong, Li Guang, Gao Wenyan, Li Benhai, Li Kai. Laser cleaning technology of 38CrMoAl material surface pollutants[J]. Infrared and Laser Engineering, 2018, 47(7): 706004

[2] Wang Min, Zhou Jianzhong, Huang Shu, Hu Lingling. Research Status and Application of Laser Cleaning[J]. Chinese Journal of Lasers, 2009, 36(s1): 174

Tools

Get Citation

Copy Citation Text

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Evaluation of efficiency for silicon wafer cleaning by image processing[J]. Optics and Precision Engineering, 2007, 15(8): 1263

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category:

Received: Feb. 6, 2007

Accepted: --

Published Online: Feb. 18, 2008

The Author Email:

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology