[1] WHITE W E, ROBERT A, DUNNE M. The linac coherent light source[J]. Journal of Synchrotron Radiation, 22, 472-476(2015).

[2] ZHAO Z T, WANG D, GU Q et al. Status of the SXFEL facility[J]. Applied Sciences, 7, 607(2017).

[3] JIA Haoyan, HUANG Senlin, JIAO Yi et al. Research advances in ultrafast X-ray free-electron lasers[J]. High Power Laser and Particle Beams, 34, 133-148(2022).

[4] DECKING W, ABEGHYAN S, ABRAMIAN P et al. A MHz-repetition-rate hard X-ray free-electron laser driven by a superconducting linear accelerator[J]. Nature Photonics, 14, 391-397(2020).

[5] SCHOENLEIN R, ELSAESSER T, HOLLDACK K et al. Recent advances in ultrafast X-ray sources[J]. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 377, 1-37(2019).

[6] MINO L, BORFECCHIA E, SEGURA-RUIZ J et al. Materials characterization by synchrotron X-ray microprobes and nanoprobes[J]. Reviews of Modern Physics, 90, 025007(2018).

[7] NARIKOVICH A, POLIKARPOV M, BARANNIKOV A et al. CRL-based ultra-compact transfocator for X-ray focusing and microscopy[J]. Journal of Synchrotron Radiation, 26, 1208-1212(2019).

[8] ANTIPOV S, BARYSHEV S, BATURIN S et al. Thermal analysis of the diamond compound refractive lens[C], 105-109(2016).

[9] ROTH T, ALIANELLI L, LENGELER D et al. Materials for X-ray refractive lenses minimizing wavefront distortions[J]. MRS Bulletin, 42, 430-436(2017).

[10] LYUBOMIRSKIY M, SCHROER C G. Refractive lenses for microscopy and nanoanalysis[J]. Synchrotron Radiation News, 29, 21-26(2016).

[11] LYUBOMIRSKIY M, BOYE P, FELDKAMP J M et al. Diamond nanofocusing refractive X-ray lenses made by planar etching technology[J]. Journal of Synchrotron Radiation, 26, 1554-1557(2019).

[12] SNIGIREV A, KOHN V, SNIGIREVA I et al. A compound refractive lens for focusing high-energy X-rays[J]. Nature, 384, 49-51(1996).

[13] KONONENKO T V, RALCHENKO V G, ASHKINAZI E E et al. Fabrication of polycrystalline diamond refractive X-ray lens by femtosecond laser processing[J]. Applied Physics A, 122, 1-6(2016).

[14] CHEN Genyu, ZHU Zhichao, YIN Jiu et al. Experiment on ablation threshold of single crystal diamond produced by femtosecond laser processing[J]. Chinese Journal of Lasers, 46, 26-33(2019).

[15] WANG Huafeng, SUN Ke, SUN Shengzhi et al. Femtosecond laser induced microstructures in diamond and applications (Invited)[J]. Infrared and Laser Engineering, 49, 264-274(2020).

[16] CHEN Junyun, LIU Dehui, ZHANG Shengkang et al. Research on micro-milling tools of single crystal diamond by femtosecond laser technique[J]. Journal of Yanshan University, 46, 200-207(2022).

[17] WANG Y Z, DONG X H, HU J. Feasibility analysis of sapphire compound refractive lenses for advanced X-ray light sources[J]. Frontiers in Physics, 10, 908380(2022).

[18] FU M L, ZHOU H Q, LE Z C. Planar PMMA X-ray compound refractive lenses with cascaded parabolic microstructures[J]. Nuclear Instruments and Methods in Physics Research Section A:Accelerators, Spectrometers, Detectors and Associated Equipment, 868, 129-132(2017).

[19] HUANG C C, MU B Z, WANG Z S. Hard X-ray imaging by a spherical compound refractive lens[J]. Nuclear Instruments and Methods in Physics Research Section A:Accelerators, Spectrometers, Detectors and Associated Equipment, 602, 446-449(2009).

[20] JIANG L, WANG A D, LI B et al. Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application[J]. Light, Science & Applications, 7, 17134(2018).

[21] ALS-NIELSEN J, MCMORROW D[M]. Elements of modern X-ray physics, 102-106(2001).

[22] SHEN T L, CHEN T, SI J H et al. Structural changes during femtosecond laser percussion drilling of high-aspect-ratio diamond microholes[J]. Optical Engineering, 61, 016103(2022).