Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Opto-Electronic Engineering, Volume. 38, Issue 12, 69(2011)

Rotation Method for System Error Calibration of Interferometer

ZHANG Jian-feng1,2、*, CAO Xue-dong1, JING Hong-wei1, WU Shi-bin1, and YIN Xu1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
    • show less
    AbstractGet PDF
    Figures&Tables (0)
    Equations (0)
    References (5)
    Tools
    Paper Information
    Topics
    References(5)

    [2] [2] KATHERINE Creath, JAMES C Wyant. Absolute measurement of spherical surface [J]. Proc.of SPIE(S0277-786X), 1990, 1332: 1-7.

    [7] [7] XU Chen, CHEN Lei, YI Jia-yi. Method for absolute flatness measurement of optical surfaces [J]. Applied Optics(S1539-4522), 2009, 48(13): 2536-2541.

    [8] [8] CHRIS J Evans, ROBERT N Kestner. Test optics error removal [J]. Applied Optics(S1539-4522), 1996, 35(7): 1015-1021.

    [10] [10] Otaki K, Yamamoto T, Fukuda Y, et al. Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror [J]. J.Vav.Sci.Technol(S1520-8567), 2002, 20(1): 295-300.

    [13] [13] VINCENZO Greco, RICCARDO Tronconi, CIRO Del Veuhio, et al. Absolute Calibration of an Optical Flat [J]. Applied Optics(S1539-4522), 1999, 38(10): 2018-2027.

    CLP Journals

    [1] Lin Weihao, Luo Hongxin, Song Li, Zhang Yifei, Wang Jie. Absolute Flatness Measurement of Optical Elements in Synchrotron Radiation[J]. Acta Optica Sinica, 2012, 32(9): 912005

    [2] HAN Dong-song, HE Xin, WEI Zhong-hui, LI Yi-mang. Error correction of interferometer detection with high-accuracy rotation method[J]. Optics and Precision Engineering, 2015, 23(5): 1297

    [3] [in Chinese], [in Chinese], [in Chinese]. Study on the Absolute Testing of Rotationally Asymmetric Surface Deviation with the Method of Single Rotation[J]. Acta Optica Sinica, 2012, 32(8): 812006

    [4] Qi Lili, Wan Qiuhua. Angle-Measurement Technology of an Optical Pattern Rotary Encoder and Its Hardware Implementation[J]. Acta Optica Sinica, 2013, 33(4): 412001

    Tools

    Get Citation

    Copy Citation Text

    ZHANG Jian-feng, CAO Xue-dong, JING Hong-wei, WU Shi-bin, YIN Xu. Rotation Method for System Error Calibration of Interferometer[J]. Opto-Electronic Engineering, 2011, 38(12): 69

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category:

    Received: Sep. 3, 2011

    Accepted: --

    Published Online: Dec. 22, 2011

    The Author Email: Jian-feng ZHANG (phility999@yahoo.cn)

    DOI:10.3969/j.issn.1003-501x.2011.12.013

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology