Chinese Optics Letters, Volume. 11, Issue s1, S10607(2013)
Determination of optical constants in DUV/VUV
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Chun Guo, Mingdong Kong, Dawei Lin, Cunding Liu, Weidong Gao, Bincheng Li, "Determination of optical constants in DUV/VUV," Chin. Opt. Lett. 11, S10607 (2013)
Category: Duv/euv coatings
Received: Jan. 3, 2013
Accepted: Feb. 5, 2013
Published Online: Jun. 14, 2013
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