16 × 16 silicon Mach–Zehnder interferometer switch actuated with waveguide microheaters

Shuoyi Zhao; Liangjun Lu; Linjie Zhou; Dong Li; Zhanzhi Guo; Jianping Chen

doi:10.1364/prj.4.000202

Photonics Research, Volume. 4, Issue 5, 0202(2016)

16 × 16 silicon Mach–Zehnder interferometer switch actuated with waveguide microheaters

Shuoyi Zhao, Liangjun Lu, Linjie Zhou^*, Dong Li, Zhanzhi Guo, and Jianping Chen

State Key Laboratory of Advanced Optical Communication Systems and Networks, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai 200240, China

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Figures & Tables(10)

Fig. 1. Schematic of the 16×16 optical switch. Inset shows the structure of the MZI switch element.

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Fig. 2. (a) Optical microscope image of the switch chip. The inset shows the zoomed-in view of the MZI switch elements. (b) Photo of the 16×16 switch in a sealed metal box. (c) Photo of the 16×16 switch after electrical and optical package. The inset shows the zoomed-in view of a fiber array attached to the switch chip using UV-curable adhesive.

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Fig. 3. Transmission spectra at different TO power consumptions for the cross port and the bar port of an MZI switch element.

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Fig. 4. Transmission spectra of all optical paths at the all-cross and the all-bar states of the 16×16 switch.

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Fig. 5. Measured transmission spectra of the 16×16 switch at the all-cross state.

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Fig. 6. Measured transmission spectra of the 16×16 switch at the all-bar state.

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Fig. 7. Time-domain optical response of the switch element. (a) Applied square-wave electrical drive signal. (b) Measured optical waveform. The dashed lines indicate the 10% and 90% power levels.

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Fig. 8. Measured constellation diagrams of a 40 Gb/s QPSK signal. (a) BtB transmission, (b) the all cross state, and (c) the all bar state.

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Table 1. Power Consumption at the All-Cross and the All-Bar States^a

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Table 1. Power Consumption at the All-Cross and the All-Bar States^a

	S1(mW)		S2(mW)		S3(mW)		S4(mW)		S5(mW)		S6(mW)		S7(mW)
	all “0”	all “1”	all “0”	all “1”	all “0”	all “1”	all “0”	all “1”	all “0”	all “1”	all “0”	all “1”	all “0”	all “1”
1	3.86	28.0	24.5	48.7	40.7	10.7	9.83	26.3	3.63	19.6	5.10	24.6	3.27	23.6
2	4.20	25.6	3.18	24.2	10.0	27.1	0.85	20.1	1.30	18.6	1.66	21	24.7	45.5
3	3.26	25.3	1.78	20.4	1.90	20.4	7.95	27.6	13.9	34.2	14.3	33.7	5.73	23.7
4	7.97	28.5	5.70	26.6	6.26	24.1	2.42	19.9	0.44	18.8	3.49	24.7	3.64	22.6
5	12.2	36.0	4.94	24.0	9.06	29.4	7.42	28.4	3.34	22.7	10.2	29.3	40.3	11.4
6	4.49	24.6	2.05	19.8	4.88	26.0	9.73	30.9	6.44	26.9	13.8	32.5	1.85	20.4
7	20.5	42.3	32.4	6.40	1.42	21.2	3.55	22.7	3.35	21.2	9.56	28.3	1.22	18.1
8	1.58	21.7	17.4	35.9	27.0	3.64	8.69	28.6	19.6	39.7	6.26	24.7	15.4	34.6

Table 2. Performance Comparison of Reported High-Port-Count Silicon Switch Fabrics

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Table 2. Performance Comparison of Reported High-Port-Count Silicon Switch Fabrics

Technologies	Port Count	Topology	Insertion Loss (dB)	Cross Talk (dB)	Power Consump. (mW)	Reconfig. Time (μs)	Footprint ( ${mm}^{2}$ )
[20] (MZI, $TiN + p - i - n$ )	$8 \times 8$	Blocking	NA	−15 to −5 (20 nm)	4.4–32.2	0.012	NA
[14] (MZI, TiN)	$8 \times 8$	Switch and Select	$4 \pm 0.8$	−45 (30 nm)	70	250	$8 \times 8$
[11] (MZI, TiN)	$8 \times 8$	PILOSS	$6.5 \pm 1$	−23.1	NA	NA	$3.5 \times 2.4$
[19] (MZI, TiN+p-i-n)	$16 \times 16$	Benes	$6.7 - 13.9 \pm 1$	−20 to −10 (30 nm)	$881 + 289$	0.006	$10.7 \times 4.4$
[10] (MZI, TiN)	$32 \times 32$	PILOSS	$15.8 \pm 1$	−20 (1.8 nm)	2930	30	$11 \times 25$
[4] (MEMS-actuation)	$50 \times 50$	Cross-bar	$< 27.5$	$< - 20$ (13 nm)	NA	3.8	$9 \times 9$
[3] (MEMS-actuation)	$64 \times 64$	Cross-bar	$< 3.7$	−20	NA	0.9	$8.6 \times 8.6$
This work (MZI, WG heater)	$16 \times 16$	Benes	$5.2 \pm 1$	∼−30 (10 nm)	$515 + 913$	21.78	$7 \times 3.6$

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Shuoyi Zhao, Liangjun Lu, Linjie Zhou, Dong Li, Zhanzhi Guo, Jianping Chen, "16 × 16 silicon Mach–Zehnder interferometer switch actuated with waveguide microheaters," Photonics Res. 4, 0202 (2016)

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