Fig. 1. Modulation aberration simulation process

Fig. 2. Setup of FDTD simulation model

Fig. 3. Sampling of free space transfer functions in ideal and actual situations

Fig. 4. Operation process of different angle spectrum methods

Fig. 5. Schematic diagram of optical path of Linnik type low-coherence microinterferometry measurement system

Fig. 6. Near field distribution of silicon trench structure with linewidth of 10 μm and depth of 100 μm at different positions under E_x and E_y for FPM

Fig. 7. Single groove aberration and corresponding Zernike coefficients obtained from simulation and experiment

Fig. 8. Wave surface error of simulation and experiment

Fig. 9. Influence of different light source bandwidths on reflected light on upper surface in simulation

Fig. 10. Influence of bottom field of view position on modulation aberration

Fig. 11. Near field distribution of TSV with diameter of 10 μm and depth of 65 μm at different positions for FPM

Fig. 12. TSV aberrations and corresponding Zernike coefficients obtained from simulation and experiment

Fig. 13. Wave surface error of simulation and experiment