Chinese Journal of Lasers, Volume. 15, Issue 11, 652(1988)

Opto-heterodyne measurement of thickness of coated films

Lin Yao, Zhou Zhiyao, and Wang Runwen
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  • [in Chinese]
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    References(4)

    [1] [1] Joffe В В. Plat, and Surf. Finish, 70 (9), 40 (1983)

    [2] [2] Zapka W. IBM Tkch. Discloswe Bull, 27(1B), 720(1984)

    [3] [3] Sandercock J E. J. Phys. E(GB), 16(9), 866(1983)

    [4] [4] Opsal J et al. Appl. Opt., 22 (20), 3169 (1983)

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    Lin Yao, Zhou Zhiyao, Wang Runwen. Opto-heterodyne measurement of thickness of coated films[J]. Chinese Journal of Lasers, 1988, 15(11): 652

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    Paper Information

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    Received: Jul. 1, 1987

    Accepted: --

    Published Online: Aug. 13, 2012

    The Author Email:

    DOI:

    CSTR:32186.14.

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