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Microelectronics, Volume. 52, Issue 3, 454(2022)

Study on a Lateral Insulated Gate Bipolar Transistor with Surface Superjunction

ZHOU Miao1, NI Xiaodong1, HE Yitao2, CHEN Chen3, and ZHOU Xin3,4
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    ZHOU Miao, NI Xiaodong, HE Yitao, CHEN Chen, ZHOU Xin. Study on a Lateral Insulated Gate Bipolar Transistor with Surface Superjunction[J]. Microelectronics, 2022, 52(3): 454

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    Received: Mar. 17, 2022

    Accepted: --

    Published Online: Jan. 18, 2023

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.220092

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology