Chinese Journal of Lasers, Volume. 44, Issue 10, 1002002(2017)

Submicron Fine Cutting-Surface of Sapphire Obtained by Chemical Corrosion Assisted Picosecond Laser Filamentation Technology

Yan Tianyang1、*, Ji Lingfei1, Li Lin1,2, Amina1, Wang Wenhao1, Lin Zhenyuan1, and Yang Qiang1
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  • 2[in Chinese]
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    The ultra-short pule laser with the wavelength of 1064 nm and the pulse width of 10 ps is used as filamentation excitation source to induce the self-focusing effect inside sapphire creating a long filamentation trace, and the length of the filamentation trace breaks through the limitation of Rayleigh length. On the basis of different phases between filamentation region and the rest of the sapphire, we obtain fine cutting-surface of sapphire with roughness of 800 nm with the help of chemical corrosion. Arbitrary cutting paths can be achieved by this technique. The filamentation characteristics of picosecond laser and the processing parameters for the presented technique are studied. The laser power threshold of self-focusing effect is determined to be 2.78×106 W. The effects of picosecond laser peak power, focusing position and the number of pulses on the initial position of filamentation and cutting quality are investigated. The processing parameters for realizing high precision cutting of sapphire are obtained.

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    Yan Tianyang, Ji Lingfei, Li Lin, Amina, Wang Wenhao, Lin Zhenyuan, Yang Qiang. Submicron Fine Cutting-Surface of Sapphire Obtained by Chemical Corrosion Assisted Picosecond Laser Filamentation Technology[J]. Chinese Journal of Lasers, 2017, 44(10): 1002002

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    Paper Information

    Category: laser manufacturing

    Received: Apr. 8, 2017

    Accepted: --

    Published Online: Oct. 18, 2017

    The Author Email: Tianyang Yan (yantianyang@emails.bjut.edu.cn)

    DOI:10.3788/CJL201744.1002002

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