Fig. 1. Schematic of quadri-wave lateral shearing interferometer

Fig. 2. Schematic of beam splitter components with QWLSI. (a1) Ideal sinusoidal grating; (a2) ideal amplitude grating; (b1) improved Hartmann mask; (b2) binary amplitude grating ; (c1) random encoded grating; (c2) random encoded amplitude grating; (d) phase grating

Fig. 3. Diagrams of transmittance of different gratings^[44]. (a) Randomly encoded hybrid grating based on luminous flux constraint (encoding coefficient (A,B) is (20,3)); (b) randomly encoded hybrid grating based on luminous flux constraint (encoding coefficient (A,B) is (30,2)); (c) quantized grating corresponding to globally random encoded hybrid grating in a single period (D×D is 40×40); (d) ideal two-dimensional sinusoidal grating in a single period

Fig. 4. Image processing flow chart of QWLSI

Fig. 5. Quadri-wave lateral shearing interferometer. (a) Photo; (b) interferogram processing control panel

Fig. 6. Zero-check test optical path for quadri-wave lateral shearing interferometer

Fig. 7. Experimental system for dynamic response testing of quadri-wave lateral shearing interferometer

Fig. 8. Partial measurement results of quadri-wave lateral shearing interferometer and Shack-Hartmann wavefront sensors for the single Zernike aberration response. (a) Z4; (b) Z8; (c) Z18; (d) Z20; (e) Z23; (f) Z32