Study on Manufacturing Process of Masses of Integrated Quartz MEMS Gyroscope

BAI Shunfeng; LI Guilong; ZHANG Ting; XIE Jiawei; DONG Hongkui; WANG Li; HU Shuang; ZENG Qinghai; LI Ruijie; JIAN Xiaojuan

doi:10.11977/j.issn.1004-2474.2023.05.015

Piezoelectrics & Acoustooptics, Volume. 45, Issue 5, 731(2023)

Study on Manufacturing Process of Masses of Integrated Quartz MEMS Gyroscope

BAI Shunfeng^1,2,3, LI Guilong^1,2,3, ZHANG Ting^1,2,3, XIE Jiawei^1,2,3, DONG Hongkui^1,2,3, WANG Li^1,2,3, HU Shuang^1,2,3, ZENG Qinghai^1,2,3, LI Ruijie^1,2,3, and JIAN Xiaojuan⁴

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¹[in Chinese]

²[in Chinese]

³[in Chinese]

⁴[in Chinese]

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References(1)

[6] [6] SIROTA M,LIPAVSKY B,NUTTMAN D,et al.Laser induced chemical etching of quartz for MEMS sensors fabrication［C］//HI,USA:2023 IEEE International Symposiμm on Inertial Sensors and Systems (INERTIAL),2023:1-4.

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BAI Shunfeng, LI Guilong, ZHANG Ting, XIE Jiawei, DONG Hongkui, WANG Li, HU Shuang, ZENG Qinghai, LI Ruijie, JIAN Xiaojuan. Study on Manufacturing Process of Masses of Integrated Quartz MEMS Gyroscope[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 731

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Paper Information

Received: Jul. 21, 2023

Accepted: --

Published Online: Jan. 6, 2024

The Author Email:

DOI:10.11977/j.issn.1004-2474.2023.05.015

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology