In order to meet the requirements of the integrated gyroscope chip for high-precision masses, this paper adopts the electron beam physical vapor deposition (EBPVD) instead of traditional electroplating process to form the masses with a thickness of about 2 μm at the tips of tuning fork. The thickness uniformity, alignment accuracy and film adhesion of the masses are investigated. Firstly, by adjusting the height and angle of deposition, the thickness requirements are met. Secondly, in order to ensure the alignment accuracy, the metal mask jig and wafer adjustment jig are designed. Finally, the optimal deposition parameters are determined through experiments. In addition, the laser trimming experiment on the fabricated masses is carried out. After trimming, the amplitude of the mechanical coupling error of gyroscope is decreased from the initial value of 301.0 mV to 17.6 mV.