Chinese Journal of Lasers, Volume. 39, Issue 12, 1207002(2012)
Thin Film Parameters Based on Polarized Light Reflected from the Multi-Point Measurement
[1] [1] Huang Zuohua, He Zhenjiang, Yang Guanling et al.. The multifunctional ellipsometer [J]. Optical Technique, 2001, 27(9): 432~434
[2] [2] Huang Zuohua, He Zhenjiang. The optical methods for measuring the thickness and refractive index of thin films[J]. Modern Scientific Instruments, 2003, 4: 42~44
[3] [3] M. Chiu, J. Leeand, D. Su. Complex refractive-index measurement based on Fresnel′s equations and the use of heterodyne interefrometry[J]. Appl. Opt., 1999, 38(13): 2936~2939
[4] [4] R. M. A. Azzam, A. R. M. Zaghloul. Polarization-independent reflectance matching (PRIM): a technique for the determination of the refractive index and thickness of transparent films[J]. Optics (Paris), 1977, 8(3): 201~205
[5] [5] H. Nodera, I. Awai, J. I. Lkenoue. Refractive index measurement of bulk materials: prism coupling method [J]. Appl. Opt., 1982, 22(8): 1944~1947
[6] [6] P. K. Tien, R. Ulrioh. Theory of prism-film coupler and thin-film light guides [J]. J. Opt. Soc. Am., 1970, 60(10): 1325~1337
[9] [9] S. Herminghaus, B. A. Smitch, J. D. Swalen. Electrooptic coefficients in electric field-poledpolymer waveguides[J]. J. Opt. Soc. Am. B, 1991, 18(6): 2311~2316
[10] [10] R. ulrich. R. Torge. Measurement of thin film parameters with a prim coupler [J]. Appl. Opt., 1973, 12(12): 2901~2905
[11] [11] T. Kihara, K. Yokomori. Simultaneous measurement of refractive index and thickness of thin film by polarized reflectances [J]. Opt. Complex Systems, 1990, 29(34): 5069~5073
[12] [12] A. Rosencwaig, J. Opsal, D. L. Willenbory et al.. Beam profile reflectometry: a newtechnique for dielectric film measurements[J]. Appl. Phys. Lett., 1992, 60(11): 4482~4487
[13] [13] Zhang Shaodi, Sun Honghai. High precision method of long-ranged laser spot position measurement[J]. Chinese J. Lasers, 2012, 39(7): 0708003
[15] [15] Cui Naidi, Liang Jingqiu, Liang Zhongzhu et al.. Photonic crystal single channel side-coupled waveguide with parallel resonators[J]. Acta Optica Sinica, 2012, 32(2): 0223001
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Zhou Jinzhao, Song Yajie, Zeng Xianyou, Wang Zebin, Huang Zuohua. Thin Film Parameters Based on Polarized Light Reflected from the Multi-Point Measurement[J]. Chinese Journal of Lasers, 2012, 39(12): 1207002
Category: materials and thin films
Received: Jul. 25, 2012
Accepted: --
Published Online: Nov. 6, 2012
The Author Email: Jinzhao Zhou (zzzhoujinzhao@126.com)