[1] [1] GUO R L, DENG W Q, LI D L. Optimization design and performance analysis of CNC machine tools composite structure bed based on grey theory［J］. Journal of Lanzhou University of Technology, 2021, 47(5): 53-58.

[2] [2] EKINCI T O, MAYER J R R, CLOUTIER G M. Investigation of accuracy of aerostatic guideways［J］. International Journal of Machine Tools and Manufacture, 2009, 49(6): 478-487.

[3] [3] WEI D H, LI K R, KUANG Y, et al. Research on stress and precision control technology of welded steel parts［J］. Journal of Mechanical Strength, 2021, 43(5): 1170-1176.

[4] [4] QI E B, FANG Z Y, SUN T, et al. A method for predicting hydrostatic guide error averaging effects based on three-dimensional profile error［J］. Tribology International, 2016, 95: 279-289.

[5] [5] MI J, MA W S, YANG Q D, et al. Study on the low stress manufacturing characteristics of machining tool basic parts［J］. Machinery Design & Manufacture, 2021(1): 202-205.

[6] [6] HE G Y, SUN G M, ZHANG H S, et al. Hierarchical error model to estimate motion error of linear motion bearing table［J］. The International Journal of Advanced Manufacturing Technology, 2017, 93(5/6/7/8): 1915-1927.

[7] [7] SUN M N, MI L, GAN J, et al. An optimum identification method of dynamic characteristic parameters of guideway joint on a NC machine tool［J］. Journal of Sichuan University (Engineering Science Edition), 2012, 44(3): 217-223.

[8] [8] HWANG J, PARK C H, KIM S W. Estimation method for errors of an aerostatic planar XY stage based on measured profiles errors［J］. The International Journal of Advanced Manufacturing Technology, 2010, 46(9/10/11/12): 877-883.

[9] [9] TANG H, DUAN J, ZHAO Q C. A systematic approach on analyzing the relationship between straightness & angular errors and guideway surface in precise linear stage［J］. International Journal of Machine Tools and Manufacture, 2017, 120: 12-19.

[10] [10] LI W, LI B Z, ZHANG X J, et al. Research on laser flatness measurement of machine tool table based on MATLAB［J］. Applied Laser, 2018, 38(4): 668-671.

[11] [11] CHANG B, MI J, YANG Q D. Dynamic characteristic analysis and structural optimization design of grinder guideway［J］. Machine Design & Research, 2020, 36(6): 110-113.

[12] [12] WANG S K. Analysis on positioning accuracy of ball screw feed system ［D］. Dalian: Dalian University of Technology, 2006.

[13] [13] DU S W, HU J C, ZHU Y, et al. Analysis and compensation of synchronous measurement error for multi-channel laser interferometer［J］. Measurement Science and Technology, 2017, 28(5): 055201.

[14] [14] TAO H H, FAN J W, WU C J. Approach to predict geometric errors for machine tools′ guideways based on tolerance［J］. Engineering science and technology,2020,52(4):235-242.

[15] [15] KE Y L, HOU W M, JU A S, et al. Application of laser heterodyne interferometer in the roll characteristics measurement of linear displacement stage［J］. Applied Laser, 2016, 36(1): 96-101.