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Spectroscopy and Spectral Analysis, Volume. 39, Issue 2, 529(2019)

Effect of Pulse Power on the Phase Structure and Spectral Properties of SiCx Thin Films Containing Si Quantum Dots

ZHANG Zhi-heng*, ZHAO Fei, YANG Wen, MO Jing-hui, GE Wen, LI Xue-ming, and YANG Pei-zhi
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    ZHANG Zhi-heng, ZHAO Fei, YANG Wen, MO Jing-hui, GE Wen, LI Xue-ming, YANG Pei-zhi. Effect of Pulse Power on the Phase Structure and Spectral Properties of SiCx Thin Films Containing Si Quantum Dots[J]. Spectroscopy and Spectral Analysis, 2019, 39(2): 529

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    Paper Information

    Received: Jan. 20, 2018

    Accepted: --

    Published Online: Mar. 6, 2019

    The Author Email: ZHANG Zhi-heng (zhang_zhh@foxmail.com)

    DOI:10.3964/j.issn.1000-0593(2019)02-0529-06

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology