Acta Optica Sinica, Volume. 45, Issue 9, 0913001(2025)
Modulation Properties of Waveguides Covered with Phase Change Materials in Different Ways
Fig. 1. Single mode ridge waveguide and its transmission loss test. (a) Cross-section of ridge waveguide and its mode-field intensity distribution; (b) different methods of combining materials with waveguides; (c) waveguide transmission loss test
Fig. 2. Distributions of optical field intensity at waveguide plane and cross-section for waveguides covered by aGST in different methods (@1550 nm)
Fig. 3. Optical transmission transmittance of waveguides with materials attached in different ways
Fig. 4. Runway micro-ring resonance structure and resonant optical field in the ring with GST attached in full coverage mode on different areas. (a) Schematic of runway micro-ring resonance structure; (b) straight waveguide; (c) curved waveguide
Fig. 5. Spectra inside the micro-ring after the straight waveguide of the micro-ring is covered by materials
Fig. 6. Spectra inside the micro-ring after the bent waveguide of the micro-ring is covered by materials
Fig. 7. Spectra inside the micro-ring after filling the trench of the waveguide with SiO2 and attaching phase change material on the top surface
Fig. 8. Optical photographs of the waveguide covered with phase change material. (a) Substrate A; (b) substrate B
Fig. 9. Spectra of waveguides in substrate A and substrate B. (a) Spectra of reference straight waveguides before and after annealing; (b) spectra of two waveguide devices covered with GST material, when GST is in amorphous and crystalline state
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Jie Liao, Lidan Lu, Guang Chen, Wenbo Bo, Yingjie Xu. Modulation Properties of Waveguides Covered with Phase Change Materials in Different Ways[J]. Acta Optica Sinica, 2025, 45(9): 0913001
Category: Integrated Optics
Received: Feb. 13, 2025
Accepted: Feb. 28, 2025
Published Online: May. 16, 2025
The Author Email: Lidan Lu (lldan_dido@bistu.edu.cn)
CSTR:32393.14.AOS250594