Fig. 1. Measurement schematic

Fig. 2. Ray diagram

Fig. 3. Schematic diagram of monitoring device

Fig. 4. Schematic of optical scanning

Fig. 5. Deviation between theoretical and simulation deflection angles

Fig. 6. Translation deviation

Fig. 7. Transmittance of specimens with different curvature radii

Fig. 8. Influence of incident angle deviation on transmittance

Fig. 9. Influence of detection aperture translation deviation on transmittance

Fig. 10. Influence of curvature radius deviation on transmittance

Fig. 11. Influence of center thickness deviation on transmittance

Fig. 12. Influence of wavelength deviation on transmittance