Study on Ultrafast Laser Separation Technology for Optical Components with Complex Microstructures

Qiuchen Xie; Tianfeng Zhou; Zihao Zeng; Yaxin Xu; Zekai Feng; Peng Liu

doi:10.3788/CJL241352

Chinese Journal of Lasers, Volume. 52, Issue 12, 1202405(2025)

Study on Ultrafast Laser Separation Technology for Optical Components with Complex Microstructures

Qiuchen Xie¹, Tianfeng Zhou¹, Zihao Zeng¹, Yaxin Xu^1,2, Zekai Feng^1,2, and Peng Liu^1,2、*

Author Affiliations

¹School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China

²Institute of Optical Ultra-Precision Manufacturing Technology, Chongqing Innovation Center, Beijing Institute of Technology, Chongqing 401152, China

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Figures & Tables(15)

Fig. 1. Diagram of liquid-phase assisted ultrafast laser separation manufacturing technology for optical components with complex microstructures

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Fig. 2. Diagrams of optical system of Bessel beam. (a) Main parameters of optical system; (b) Bessel beam inside compound

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Fig. 3. First deflection of Bessel beam inside compound

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Fig. 4. Simulation of optical system of Bessel beam. (a) Optical path system in non-sequential mode; (b) relative positions of optical component, detector and liquid matching solution; (c) comparison of Bessel beam transmission in different media

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$Distributions of light field and axial central energy distributions of Bessel beams after incident on microstructured optical component in media with different refractive indices$

Fig. 5. Distributions of light field and axial central energy distributions of Bessel beams after incident on microstructured optical component in media with different refractive indices

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Fig. 6. Ultrafast laser Bessel beam separation device

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Fig. 7. Establishment and separation of modified surfaces inside CMSOC. (a) Modified surface established inside microstructured optical component; (b) modified path on incident surface of optical component; (c) sectional morphologies obtained under different liquid phase matching media

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Fig. 8. Micro-morphologies of sections under different liquid phase matching media. (a) Purified water; (b) deformation of morphology caused by natural crack propagation; (c) RIL; (d) delamination traces of thick material

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Fig. 9. Separation results. (a) Array elements at edge of separated optical component using RIL-assisted modification; (b) section edge chipping; (c) roughness of section modified area

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Fig. 10. Laser modification process window of H-BaK3 material

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Fig. 11. Application expansion of ultrafast laser separation manufacturing technology for optical components with complex structures. (a) Core extraction of double-sided microlens array; (b) special-shaped cutting and separation of double-sided compound eye lens

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Table 1. Main parameters of optical system design of Bessel beam
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Table 1. Main parameters of optical system design of Bessel beam
Parameter Value
$ω_{0}$ /mm 6.5
$α$ /（°） 5
$f_{1}$ /mm 150
$f_{2}$ /mm 20
$Z_{m a x 2}$ /mm 3
$β_{2}$ /（°） 17

Table 2. Main parameters of ultrafast laser
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Table 2. Main parameters of ultrafast laser
Laser parameter Value
Central emission wavelength /nm 1030
Maximum output power /W 80
Beam quality factor M² <1.2
Beam diameter /mm 5
Pulse width /ps 0.2‒10.0
Frequency /MHz 0.1‒2.0

Table 3. Main performance parameters of H-BaK3 material
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Table 3. Main performance parameters of H-BaK3 material
Parameter Value
$n_{1}$ @1030 nm 1.53643
Abbe number 62.78
Temperature coefficient of refractive index 2.6×10^-6
Density /（g/cm³） 2.84
Coefficient of expansion /K^-1（@-30 ℃ and 70 ℃） 62×10^-7

Table 4. Main parameters of two liquid phase media
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Table 4. Main parameters of two liquid phase media
Parameter Water RIL
$n_{2}$ @1030 nm 1.326 1.536
Abbe number 55.8 32.8
Temperature coefficient of refractive index@15‒35 ℃ -0.000167 -0.000416
Density 1 0.975
Δn 0.21 0

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Qiuchen Xie, Tianfeng Zhou, Zihao Zeng, Yaxin Xu, Zekai Feng, Peng Liu. Study on Ultrafast Laser Separation Technology for Optical Components with Complex Microstructures[J]. Chinese Journal of Lasers, 2025, 52(12): 1202405

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