Metrology & Measurement Technology, Volume. 45, Issue 2, 68(2025)
Frequency scanning interferometry method for distance measurement based on electro⁃optical intensity⁃phase cascade modulation
Fig. 2. Schematic diagram of an FSI distance measurement system based on electro⁃optical intensity⁃phase cascade modulation
Fig. 3. Absolute distance and relative displacement measurement scheme
Fig. 4. Schematic diagram of the spectral changes of the signal during modulation and demodulation processes
Fig. 5. Simulation results of absolute distance measurement at a distance of 100 m
Fig. 6. Simulation results of dynamic measurement of absolute distance at a distance of 200 m
Fig. 7. Simulation results of relative displacement measurement for 10 µm / s uniform motion
Fig. 8. Simulation results of relative displacement measurement for 50 µm / s² accelerated motion
Fig. 9. Simulation results of relative displacement measurement with vibration frequency of 200 Hz and vibration amplitude of 500 nm
Table 1.
Standard deviation of absolute distance simulation measurements at different distances View tableView in ArticleTable 1.
Standard deviation of absolute distance simulation measurements at different distances 距离 / m 距离解算标准差 / µm 10 3.79 50 4.14 100 3.59 200 4.76 300 5.09 400 3.76 500 4.57
Table 2.
Standard deviation of absolute distance simulation measurements at different signal⁃to⁃noise ratios View tableView in ArticleTable 2.
Standard deviation of absolute distance simulation measurements at different signal⁃to⁃noise ratios 信噪比 / dB 距离解算标准差 / µm 20 34.32 30 11.76 40 3.59 50 1.21 60 0.39
Table 3.
Standard deviation of relative displacement simulation measurements at different speeds View tableView in ArticleTable 3.
Standard deviation of relative displacement simulation measurements at different speeds 速度 / (µm / s) 标准差 / nm 0.5 10.05 1 6.47 10 9.39 50 8.41 100 5.33 200 9.85
Table 4.
Standard deviation of relative displacement simulation measurements at different accelerations View tableView in ArticleTable 4.
Standard deviation of relative displacement simulation measurements at different accelerations 加速度 / (µm / s²) 标准差 / nm 0.5 8.94 1 8.02 10 9.66 100 9.08 500 8.91
Table 5.
Standard deviation of vibration simulation measurements for different vibration frequencies and vibration amplitudes View tableView in ArticleTable 5.
Standard deviation of vibration simulation measurements for different vibration frequencies and vibration amplitudes 振动频率 / Hz 振动幅值 / nm 标准差 / nm 50 500 8.20 50 1 000 9.11 200 500 7.81 200 1 000 6.58 500 500 8.48 500 1 000 7.60
Get Citation
Copy Citation Text
Zhongwen DENG, Chuanfeng LIU, Hengkang ZHANG, Haifeng SUN, Shuwei ZHANG, Xiaoping LI. Frequency scanning interferometry method for distance measurement based on electro⁃optical intensity⁃phase cascade modulation[J]. Metrology & Measurement Technology, 2025, 45(2): 68
Category: Ultrafast Optical Measurement Technology
Received: Dec. 9, 2024
Accepted: --
Published Online: Jul. 23, 2025
The Author Email:
