Fig. 1. Schematic diagram of the structure of the electric spindle

Fig. 2. Schematic diagram of microstructure precision machined structure

Fig. 3. Schematic diagram of the working process of the microstructure precision machining mechanism

Fig. 4. Schematic diagram of the force-sensing structure

Fig. 5. Schematic diagram of the working process of the force sensing mechanism

Fig. 6. Current curve of three-phase winding of motor

Fig. 7. Axial magnetic field distribution of electric spindle motor

Fig. 8. Schematic diagram of finite element simulation model of microstructure precision machining mechanism

Fig. 9. Relationship between output displacement and excitation current at different bias currents

Fig. 10. Relationship between output displacement and excitation current under different prestresses

Fig. 11. Schematic diagram of the finite element simulation model of the force sensing mechanism

Fig. 12. Variation of the load on the GMM rod with time under sinusoidal excitation conditions

Fig. 13. Waveform of induced voltage with different bias current

Fig. 14. Static performance test platform for electric spindle microstructure precision machining mechanism

Fig. 15. Comparison curves of output displacement at different bias currents

Fig. 16. Prestress test bench of micro-structure precision machining mechanism of electric spindle

Fig. 17. Comparison curve of output displacement under different prestresses

Fig. 18. Output displacement hysteresis nonlinear curve of micro-structure precision machining mechanism

Fig. 19. Thrust test platform of micro-structure precision machining mechanism of electric spindle

Fig. 20. Thrust curve of micro-structure precision machining mechanism with different bias current