Acta Optica Sinica, Volume. 44, Issue 13, 1322001(2024)

High-Precision Compensation Machining Method for Infrared Freeform Surface Prism

Xiaotian Liu1,2, Jun Yu1,2、*, Xiaoqiang Wang1,2, Chunling He1,2, Yifan Wang1,2, Xiao Wen1,2, Dongfang Wang3, and Zhanshan Wang1,2、**
Author Affiliations
  • 1Key Laboratory of Advanced Micro-Structured Materials, Ministry of Education, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
  • 2Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
  • 3Optoelectronic Manufacturing Engineering Center, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
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    Figures & Tables(15)
    Design results and imaging quality analysis of freeform surface prism. (a) Optical path diagram of the freeform surface prism system; (b) MTF curves of the optical system at 25 ℃
    Machining errors of freeform surface prism system. (a) Inter-surface spacing error; (b) surface tilt error; (c) surface decenter error
    Influences on MTF of the optical system when freeform surface 1 and 2 experience perturbation. (a) Freeform surface 1 experiences decenter perturbation in the Y direction; (b) freeform surface 2 experiences decenter perturbation in the Y direction; (c) freeform surface 1 experiences tilted perturbation in the X direction; (d) freeform surface 2 experiences tilted perturbation in the X direction; (e) air spacing 1 experiences perturbation in the Z direction; (f) air spacing 2 experiences perturbation in the Z direction
    Assembly diagram of infrared freeform surface prism
    Finite element analysis of freeform surface prism
    Assembly diagram infrared freeform surface prism
    Ultra-precision compensation machining process flow of prism
    Measurement schematic diagram of prism angle error. (a) In-situ measurement; (b) off-machine measurement
    Schematic diagram of inspection fixture
    Detection results for the infrared freeform surface prism. (a) Close-range imaging ; (b) original image and its long-range imaging
    • Table 1. Optical system design specifications

      View table

      Table 1. Optical system design specifications

      ParameterSpecification
      Spectral range /μm3.7-4.8
      Aperture /mm20
      F-number1
      Field of view /(°)×(°)21.8×16.4
      Focal /mm20
      Detector /(pixel×pixel)384×288
      Pixel size /(μm/pixel)25
    • Table 2. Tolerance sensitivity analysis of machined surface

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      Table 2. Tolerance sensitivity analysis of machined surface

      Machining errorSurfaceTolerance sensitivity
      ΔZEven aspherical surface and freeform surface 1 /mm±0.3
      Freeform surface 1 and freeform surface 2 /mm±0.1
      Freeform surface 2 and plane /mm±0.1
      Plane and diffractive surface /mm±0.3
      ΔθEven aspherical surface /(°)±0.4
      Freeform surface 1 (YOZ) /(°)±0.1
      Freeform surface 1 (XOZ) /(°)±0.1
      Freeform surface 2 (YOZ) /(°)±0.1
      Freeform surface 2 (XOZ) /(°)±0.1
      ΔYEven aspherical surface /mm±0.6
      Freeform surface 1 /mm±0.3
      Freeform surface 2 /mm±0.1
      ΔXFreeform surface 1 /mm±0.2
      Freeform surface 2 /mm±0.1
    • Table 3. Machining yield rate of freeform surface prism at MTF of 20 lp/mm

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      Table 3. Machining yield rate of freeform surface prism at MTF of 20 lp/mm

      Yield rate /%MTF
      900.63056088
      800.68517093
      500.75675737
      200.80206783
      100.82154026
    • Table 4. Deformation analysis of machining process of each surface

      View table

      Table 4. Deformation analysis of machining process of each surface

      SurfaceRotational speed n /(rad·s-1Deformation of surface under different directions /nm
      +Z-Z+X-X
      Even aspherical surface52.40-2.54-2.65-2.96-2.23
      Freeform surface 15.230.02-0.07-4.744.69
      Freeform surface 25.230.01-0.062.06-2.12
      Plane52.40-2.68-2.65-11.005.68
      Bivariate surface52.40-3.53-3.4911.67-18.70
    • Table 5. In-situ and off-machine measurement of prism compensation angle errors

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      Table 5. In-situ and off-machine measurement of prism compensation angle errors

      AngleTheoreticalvalue /(°)Off-machine measurement /(°)In-situmeasurement /(°)Machiningerror /(°)
      Before compensationAfter compensationCompensation angle
      1106.104106.076106.0760-0.028
      2138.000138.082138.0340.0480.034
      342.41742.36042.4120.052-0.005
      4155.128155.121155.1220155.125-0.005
      548.60748.60248.602048.607-0.005
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    Xiaotian Liu, Jun Yu, Xiaoqiang Wang, Chunling He, Yifan Wang, Xiao Wen, Dongfang Wang, Zhanshan Wang. High-Precision Compensation Machining Method for Infrared Freeform Surface Prism[J]. Acta Optica Sinica, 2024, 44(13): 1322001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jan. 25, 2024

    Accepted: Mar. 15, 2024

    Published Online: Jul. 19, 2024

    The Author Email: Yu Jun (yujun_88831@tongji.edu.cn), Wang Zhanshan (wangzs@tongji.edu.cn)

    DOI:10.3788/AOS240569

    CSTR:32393.14.AOS240569

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