Journal of Semiconductors, Volume. 42, Issue 11, 114101(2021)
Investigation of time domain characteristics of negative capacitance FinFET by pulse-train approaches
Fig. 1. (Color online) (a) The fabrication flow of the fabrication of NC FinFET. (b) Cross-sectional TEM image of the NC FinFET device. (c) Schematic diagram of the resistive load inverter characterization single-transistor frequency characteristics test circuit. (d) Schematic diagram of the optimization measurement scheme.
Fig. 2. (Color online) Real-time output data of the load-resistance based inverter measurement, with the gate pulse width (a) 1 ms, and (b) 10
Fig. 3. (Color online) Experimentally measured output voltage as a function of the applied gate signal frequencies.
Fig. 4. Waveforms of different frequencies displayed directly on the oscilloscope after resistive loading, (a)10 kHz and (b) 100 kHz.
Fig. 5. (Color online) The measured real-time pulse train on-current of single-transistor.
Fig. 6. (Color online) Measured transient currents of the single transistor, (a) with 10 ms pulse width, (b) with 1
Fig. 7. (Color online) Real-time test results of on-state
Fig. 8. (Color online) Experimentally measured variation of the on-state current with pulse width for NC FinFET and conventional FinFET. (a) NMOS. (b) PMOS.
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Yuwei Cai, Zhaohao Zhang, Qingzhu Zhang, Jinjuan Xiang, Gaobo Xu, Zhenhua Wu, Jie Gu, Huaxiang Yin. Investigation of time domain characteristics of negative capacitance FinFET by pulse-train approaches[J]. Journal of Semiconductors, 2021, 42(11): 114101
Category: Articles
Received: Apr. 5, 2021
Accepted: --
Published Online: Nov. 12, 2021
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