[1] [1] ZHANG Q，DU R，LI B，et al. Piezoelectric acoustic wave characteristics of Pb（In0.5Nb0.5）O3-Pb（Mg1/3Nb2/3）O3-PbTiO3 single crystal substrate：A comparative study with and without SiO2 overlay［J］. Journal of Applied Physics，2022，132（2）：024103.

[2] [2] MASAMUNE C，YANAGITANI T. Ion beam induceda-axis in-plane orientedc-axis oriented AlN thin film growth for high-QBAW resonator application［C］//Glasgow，UK：2019 IEEE International Ultrasonics Symposium（IUS），2019：1127-1128.

[3] [3] LUO T，XU Q，WEN Z，et al. Spurious-free S1 mode AlN/ScAlN-based Lamb wave resonator with trapezoidal electrodes［J］. IEEE Electron Device Letters，2023，44（4）：574-577.

[4] [4] XIE Y，ZHOU J，LIU Y，et al. 6 GHz lithium niobate MEMS resonator with square spiral electrodes［C］//Xi’an，China：2021 IEEE International Ultrasonics Symposium（IUS），2021：1-3.

[5] [5] LINK S，LU R，YANG Y，et al. An A1 mode resonator at 12 GHz using 160 nm lithium niobate suspended thin film［C］//Xi’an，China：2021 IEEE International Ultrasonics Symposium（IUS），2021：1-4.

[6] [6] SONG Y，GONG S. Wideband spurious-free lithium niobate RF-MEMS filters［J］. Journal of Microelectrom-echanical Systems，2017，26（4）：820-828.

[7] [7] GONG S，PIAZZA G. Design and analysis of lithium-niobate-based high electromechanical coupling RF-MEMS resonators for wideband filtering［J］. IEEE Transactions on Microwave Theory and Techniques，2013，61（1）：403-414.

[8] [8] YANDRAPALLI S，PLESSKY V，KOSKELA J，et al. Analysis of XBAR resonance and higher order spurious modes［C］//Glasgow，UK：2019 IEEE International Ultrasonics Symposium（IUS），2019：185-188.

[9] [9] YANDRAPALLI S，KUCUK S E，ATAKAN B，et al. Fabrication and analysis of thin film lithum niobate resonators for 5 GHz Frequency and largeK2 t applications［C］//Gainesville，FL，USA：2021 IEEE 34th International Conference on Micro Electro Mechanical Systems（MEMS），2021：967-969.

[10] [10] LU R，YANG Y，LINK S，et al. A1 resonators in 128°Y-cut lithium niobate with electromechanical coupling of 46.4%［J］. Journal of Microelectromechanical Systems，2020，29（3）：313-319.

[11] [11] SU R，YU Z，FU S，et al. Lithium niobate thin film based A1 mode resonators with frequency up to 16 GHz and electromechanical coupling factor near 35%［C］//Munich，Germany：2023 IEEE 36th International Conference on Micro Electro Mechanical Systems（MEMS），2023：1190-1193.

[12] [12] WEN Z，LIU W，TONG X，et al. A highQ6.203 GHz laterally-excited bulk acoustic resonator with reflective grids［C］//Montreal，QC，Canada：2023 IEEE International Ultrasonics Symposium（IUS），2023：1-4.

[13] [13] ZENG M，LIU W，WEN Z，et al. A spurious-free laterally-excited bulk acoustic resonator with ring-shaped interdigital electrodes［C］//Montreal，QC，Canada：2023 IEEE International Ultrasonics Symposium（IUS），2023：1-4.

[14] [14] GU X，LIU J，CAI Y，et al. Laterally-excited bulk-wave resonators（XBARs）with embedded electrodes in 149.5°Z-cut LiNbO3［C］//Xiamen，China：2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems（NEMS），2021：931-934.

[16] [16] WEIS R S，GAYLORD T K. Lithium niobate：Summary of physical properties and crystal structure［J］. Journal of Applied Physics，1985，37：191-203.

[17] [17] GONG S，PIAZZA G. Design and analysis of lithium-niobate-based high electromechanical coupling RF-MEMS resonators for wideband filtering［J］. IEEE Transactions on Microwave Theory and Techniques，2013，61（1）：403-414.

[18] [18] LAMANNA L，RIZZI F，BHETHANABOTLA V R，et al. GHz AlN-based multiple mode SAW temperature sensor fabricated on PEN substrate［J］. Sensors and Actuators A：Physical，2020，315：112268.

[19] [19] GONG S，LU R，YANG Y，et al. Microwave acoustic devices：Recent advances and outlook［J］. IEEE Journal of Microwaves，2021，1（2）：601-609.

[20] [20] ZHANG Q，HAN T，TANG G，et al. SAW characteristics of AlN/SiO2/3C-SiC layered structure with embedded electrodes［J］. IEEE Transactions on Ultrasonics，Ferroelectrics，and Frequency Control，2016，63：1608-1612.

[21] [21] LIU J，LIU W，WEN Z，et al. A laterally excited bulk acoustic wave resonator based on LiNbO3 with arc-shaped electrodes［J］. Micromachines，2024，15（11）：1367.

[22] [22] GONG S，PIAZZA G. Design and analysis of lithium-niobate-based high electromechanical coupling RF-MEMS resonators for wideband filtering［J］. IEEE Transactions on Microwave Theory and Techniques，2013，61（1）：403-414.

[24] [24] TRIVEDI S，NEMADE H B. Coupled resonance in SH-SAW resonator with S1813 micro-ridges for high mass sensitivity biosensing applications［J］. Sensors and Actuators B：Chemical，2018，273：288-297.