Accuracy and analysis of long-radius measurement with long trace profiler

Chinese Optics Letters, Volume. 9, Issue 10, 102301(2011)

Haixian Ye and Liming Yang

Author Affiliations

Chengdu Fine Optical Engineering Research Center, Chengdu 610041, China

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References(7)

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[3] [3] S. Qian, Q. Wang, Y. Hong, and Peter Takacs, Proc. SPIE 5921, 592104 (2005).

[4] [4] K. von Bieren, Appl. Opt. 22, 2109 (1983).

[5] [5] K. von Bieren, Proc. SPIE 343, 101 (1982).

[6] [6] S. Qian and P. Takacs, Opt. Eng. 46, 043602 (2007).

[7] [7] C. Zhou, H. Li, C. Chen, and C. Zhou, Proc. SPIE 6024, 60241M (2005).

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Haixian Ye, Liming Yang, "Accuracy and analysis of long-radius measurement with long trace profiler," Chin. Opt. Lett. 9, 102301 (2011)

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Paper Information

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Received: Mar. 2, 2011

Accepted: Apr. 21, 2011

Published Online: Jul. 13, 2011

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