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High Power Laser Science and Engineering, Volume. 2, Issue 3, 03000e26(2014)

EUV ablation of organic polymers at a high fluence

Chiara Liberatore1,2, Klaus Mann3, Matthias Muller3, Ladislav Pina2, Libor Juha1, Jorge J. Rocca4, Akira Endo1, and and Tomas Mocek1
Author Affiliations
  • 1HiLASE Centre, Institute of Physics ASCR, v.v.i., Za Radnici 825, 25241 Dolni Brezany, Czech Republic
  • 2Czech Technical University, Thakurova 2077/7, 160 00 Prague 6, Czech Republic
  • 3Laser Laboratorium Gottingen (LLG), 37077 Gottingen, Germany
  • 4Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523, USA
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    Chiara Liberatore, Klaus Mann, Matthias Muller, Ladislav Pina, Libor Juha, Jorge J. Rocca, Akira Endo, and Tomas Mocek. EUV ablation of organic polymers at a high fluence[J]. High Power Laser Science and Engineering, 2014, 2(3): 03000e26

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    Paper Information

    Category: regular articles

    Received: Mar. 3, 2014

    Accepted: May. 9, 2014

    Published Online: Nov. 5, 2014

    The Author Email:

    DOI:10.1017/hpl.2014.31

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology