Fig. 1. (Color online) Schematic diagram of a typical AWG.

Fig. 2. (Color online) Simulated effective refractive index of the waveguide with different widths and etching depths.

Fig. 3. (Color online) Transmission spectra of the central channel of the AWG with different width fluctuations (s).

Fig. 4. Widened arrayed waveguides.

Fig. 5. (Color online) Transmission spectra of the 16 channels.

Fig. 6. (Color online) Heat simulation.

Fig. 7. Dependence of the Si waveguide’s average temperature on the applied power.

Fig. 8. Micrograph of the AWG.

Fig. 9. (Color online) Transmission spectra with applied voltages of 0 and 60 V.

Fig. 10. (Color online) Simulated transmission spectra of the central channel of the AWG with width deviations of 0, 5, and 10 nm, respectively.

Fig. 11. (Color online) Measured wavelength compensation of the AWG under different voltages. (a) The transmission spectra of the 16th channel under different bias voltages. (b) The measured wavelength shift under different power consumptions.