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Chinese Journal of Lasers, Volume. 46, Issue 4, 0404012(2019)

Micro-Displacement Measurement Technology Based on Littrow-Configured Laser Feedback Grating Interference

Lingwen Kong*, Wenkui Cai, Liheng Shi, Dongmei Guo, Wei Xia, Xiaoqi Ni, Hui Hao, and Ming Wang
Author Affiliations
  • School of Physical Science and Technology, Nanjing Normal University, Nanjing, Jiangsu 210023, China
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    Figures&Tables (7)
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    Figures & Tables(7)
    1D displacement measurement system setup for LFGI of single optical path

    Fig. 1. 1D displacement measurement system setup for LFGI of single optical path

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    Reconstruction results of grating sinusoidal motion (10 Hz)

    Fig. 2. Reconstruction results of grating sinusoidal motion (10 Hz)

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    System noise of 1D displacement measurement method

    Fig. 3. System noise of 1D displacement measurement method

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    Symmetrical LFGI 2D displacement measurement system setup

    Fig. 4. Symmetrical LFGI 2D displacement measurement system setup

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    Experimental and simulation results of two Lissajous trajectories. (a) Circle; (b) ellipse

    Fig. 5. Experimental and simulation results of two Lissajous trajectories. (a) Circle; (b) ellipse

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    System noise of 2D displacement measurement method

    Fig. 6. System noise of 2D displacement measurement method

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    • Table 1. Measurement results of sinusoidal motion (10 Hz)

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      Table 1. Measurement results of sinusoidal motion (10 Hz)

      Δx /nmMeasurement result /nmMean /nmStandarddeviation /nm
      1st2nd3rd4th5th6th7th8th9th10th
      200203198205195201198201198200206200.53.44
      8008097997987967968058067867958108007.45
      10001009100110089929891001999994100110081000.26.94
      500049925004500450054997499450004999499250054999.25.27
      800080027991799680057994800779978003799979997999.35.01
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    Lingwen Kong, Wenkui Cai, Liheng Shi, Dongmei Guo, Wei Xia, Xiaoqi Ni, Hui Hao, Ming Wang. Micro-Displacement Measurement Technology Based on Littrow-Configured Laser Feedback Grating Interference[J]. Chinese Journal of Lasers, 2019, 46(4): 0404012

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    Paper Information

    Category: measurement and metrology

    Received: Dec. 7, 2018

    Accepted: Jan. 22, 2019

    Published Online: May. 9, 2019

    The Author Email:

    DOI:10.3788/CJL201946.0404012

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology