Chinese Journal of Lasers, Volume. 46, Issue 4, 0404012(2019)
Micro-Displacement Measurement Technology Based on Littrow-Configured Laser Feedback Grating Interference
By introducing a diffraction grating into the laser feedback interference(LFI) system, we propose a laser feedback grating interferometry (LFGI) based on Littrow configuration for the measurement of one-dimensional and two-dimensional displacement. The beam emitted from the semiconductor laser is incident onto the reflective holographic grating under the condition of Littrow configuration. After the diffracted light returns to the laser cavity in the direction of the incident light, a laser feedback interference effect occurs in the cavity. The sinusoidal phase modulation and demodulation technique is introduced to obtain the one-dimensional and two-dimensional displacement with high precision. The Littrow configuration and LFGI system have the advantages of great self-collimation, compact structure, easy operation and high stability. The experimental results show that the displacement measurement accuracy of the Littrow LFGI system can reach the order of 10 nm.
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Lingwen Kong, Wenkui Cai, Liheng Shi, Dongmei Guo, Wei Xia, Xiaoqi Ni, Hui Hao, Ming Wang. Micro-Displacement Measurement Technology Based on Littrow-Configured Laser Feedback Grating Interference[J]. Chinese Journal of Lasers, 2019, 46(4): 0404012
Category: measurement and metrology
Received: Dec. 7, 2018
Accepted: Jan. 22, 2019
Published Online: May. 9, 2019
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