[1] YU A W, STEPHEN M A, LI S X, et al. Space laser transmitter development for ICESat-2 mission[J]. Proceedings of SPIE, 7578, 757809(2010).

[2] SAWRUK N W, STEPHEN M A, LITVINOVITCH S, et al. Space qualified laser transmitter for NASA’s ICESat-2 mission[J]. Proceedings of SPIE, 8599, 85990O(2013).

[3] GAO SH J, WU J B, LIU Y K, et al. Development status and trend of micro-satellite laser communication systems[J]. Chinese Optics, 13, 1171-1181(2020).

[4] DONG Q R, CHEN T, GAO SH J, et al. Progress of research on satellite-borne laser communication technology[J]. Chinese Optics, 12, 1260-1270(2019).

[5] TROUPAKI E, DENNY Z H, WU S, et al. Space qualification of the optical filter assemblies for the ICESat-2/ATLAS instrument[J]. Proceedings of SPIE, 9346, 93460H(2015).

[6] [6] WANG J Y, SHU R, LIU Y N, et al.. Introduction to Imaging Spectroscopy[M]. Beijing: Science Press, 2011: 90110. (in Chinese)

[7] HAN F, LIU H J, SUN D S, et al. An ultra-narrow bandwidth filter for daytime wind measurement of direct detection Rayleigh lidar[J]. Current Optics and Photonics, 4, 69-80(2020).

[8] GAYEN S K, BILLMERS R I, CONTARINO V M, et al. Induced-dichroism-excited atomic line filter at 532 nm[J]. Optics Letters, 20, 1427-1429(1995).

[9] XU CH, XIAO O L, MA J Y, et al. High temperature annealing effect on structure, optical property and laser-induced damage threshold of Ta₂O₅ films[J]. Applied Surface Science, 254, 6554-6559(2008).

[10] ZHAO Q, PU Y T, HAO L, et al. Residual stress and laser-induced damage of ion-beam sputtered Ta₂O₅/SiO₂ mixture coatings[J]. Thin Solid Films, 592, 221-224(2015).

[11] LV Q P, HUANG M L, ZHANG SH Q, et al. Effects of annealing on residual stress in Ta₂O₅ films deposited by dual ion beam sputtering[J]. Coatings, 8, 150(2018).

[12] KIM S H, HWANGBO C K. Derivation of the center-wavelength shift of narrow-bandpass filters under temperature change[J]. Optics Express, 12, 5634-5639(2004).

[13] [13] TANG J F, GU P F, LIU X, et al.. Modern Optical Thin Film Technology[M]. Hangzhou: Zhejiang University Press, 2006: 144146. (in Chinese)

[14] [14] MACLEOD H A. ThinFilm Optical Filters[M]. Boca Raton: Tayl & Francis, 2010: 310313.

[15] [15] CHEN G. Research on the near infrared optical properties of several metal oxide thin films narrow bpass filters f space remote sensing[D]. Shanghai: Shanghai Institute of Technical Physics Chinese Academy of Sciences, 2020: 5668. (in Chinese)

[16] CHANELIERE C, AUTRAN J L, DEVINE R A B, et al. Tantalum pentoxide (Ta₂O₅) thin films for advanced dielectric applications[J]. Materials Science and Engineering: R: Reports, 22, 269-322(1998).

[17] YUAN W J, SHEN W D, ZHENG X W, et al. Optical and mechanical properties and microstructures of Nb₂O₅, Ta₂O₅ and SiO₂ thin films prepared by ion beam sputtering[J]. Acta Optica Sinica, 37, 1231001(2017).

[18] JIANG Y G, LIU H S, CHEN D, et al. Ultraviolet absorption film technology based on ion beam sputtering Ta₂O₅ thin films[J]. Optics and Precision Engineering, 27, 527-532(2019).

[19] SHANG P, XIONG SH M, LI L H, et al. Optical constants and properties of dual-ion-beam sputtering Ta₂O₅/SiO₂ thin film by spectroscopy[J]. Acta Optica Sinica, 34, 0531002(2014).

[20] WU Q D. Nucleation and growth of vapor phase deposition on solid surfaces[J]. Vacuum, 41, 1431-1433(1990).

[21] [21] WAKAKI M, KUDO K, SHIBUYA T. Physical Properties Data of Optical Materials[M]. Boca Raton: CRC Press, 2007: 301330.

[22] ZHU X D, ZHANG R J, ZHENG Y X, et al. Spectroscopic ellipsometry and its applications in the study of thin film materials[J]. Chinese Optics, 12, 1195-1234(2019).