Chinese Optics Letters, Volume. 12, Issue 7, 072201(2014)
Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique
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Juguang Hu, Qiwen Li, Xiaodong Lin, Yi Liu, Jinghua Long, Liuyang Wang, Huabin Tang, "Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique," Chin. Opt. Lett. 12, 072201 (2014)
Paper Information
Category: Optical Design and Fabrication
Received: Nov. 27, 2013
Accepted: Apr. 29, 2014
Published Online: Jun. 26, 2014
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