Acta Optica Sinica, Volume. 30, Issue 5, 1349(2010)

Fourier Transform Profilometry for Surface with Specular Reflection

Chen Lijuan* and Xu Lihua
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  • [in Chinese]
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    References(9)

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    [2] Zhu Jiangping, Hu Song, Yu Junsheng, Tang Yan, Zhou Shaolin. Theoretical Analysis of Photolithography Alignment and Calibration Method Based on Moiré Fringes[J]. Acta Optica Sinica, 2012, 32(6): 607001

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    Chen Lijuan, Xu Lihua. Fourier Transform Profilometry for Surface with Specular Reflection[J]. Acta Optica Sinica, 2010, 30(5): 1349

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 1, 2009

    Accepted: --

    Published Online: May. 11, 2010

    The Author Email: Lijuan Chen (maomao500240@126.com)

    DOI:10.3788/aos20103005.1349

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