[1] [1] 吴俊杰， 刘俭， 魏佳斯， 等. 双测头复合型微纳米测量仪的研制［J］. 光学 精密工程， 2020， 28（2）： 415-423. doi: 10.37188/OPE.20202810.2252WUJ J， LIUJ， WEIJ S， et al. Development of double probe composite micro-and nano measuring instrument［J］. Opt. Precision Eng.， 2020， 28（2）： 415-423.（in Chinese）. doi: 10.37188/OPE.20202810.2252

[2] [2] 崔长彩， 杨成， 李子清， 等. 蓝宝石衬底表面形貌检测和评价系统［J］. 光学 精密工程， 2021， 29（11）： 2556-2566. doi: 10.37188/OPE.20212911.2556CUICH C， YANGCH， LIZ Q， et al. Measuring and evaluating system for surface morphology of sapphire substrates［J］. Opt. Precision Eng.， 2021， 29（11）： 2556-2566.（in Chinese）. doi: 10.37188/OPE.20212911.2556

[3] [3] 程磊， 何洪途， 叶敏恒， 等. 纳米金刚石磨粒团聚对熔石英摩擦磨损性能的影响［J］. 光学 精密工程， 2023， 31（7）： 1031-1042. doi: 10.37188/OPE.20233107.1031CHENGL， HEH T， YEM H， et al. Effect of nanodiamond abrasive agglomeration on tribological properties of fused silica［J］. Opt. Precision Eng.， 2023， 31（7）： 1031-1042.（in Chinese）. doi: 10.37188/OPE.20233107.1031

[4] KIYONO S. Self-calibration of a scanning white light interference microscope[J]. Optical Engineering, 39, 2720-2725(2000).

[5] SCHMIT J. High-stability white-light interferometry with reference signal for real-time correction of scanning errors[J]. Optical Engineering, 42, 54-59(2003).

[6] LEI Z L, LIU X J, ZHAO L I et al. A rapid measurement method for structured surface in white light interferometry[J]. Journal of Microscopy, 276, 118-127(2019).

[7] CHEN L C, YEH S L, TAPILOUW A M et al. In-situ scanning white light interferometry employing dual-sensing configuration and active fringe-locking strategy[J]. International Journal of Nanomanufacturing, 8, 40-53(2012).

[8] TERESCHENKO S, LEHMANN P, GOLLOR P et al. Vibration compensated high-resolution scanning white-light Linnik-interferometer[C], 1032940(2017).

[9] SCHMIT J, OLSZAK A. High-precision shape measurement by white-light interferometry with real-time scanner error correction[J]. Applied Optics, 41, 5943-5950(2002).

[10] [10] 韩志刚， 陈磊. 对包络变化及移相误差不敏感的宽带光八步移相算法［J］. 红外与激光工程， 2015， 44（4）： 1236-1242. doi: 10.1016/S0924-8579(07)72025-3HANZH G， CHENL. Eight-step phase shifting algorithm for broadband light interferometry insensitive to envelop variation and phase shifting error［J］. Infrared and Laser Engineering， 2015， 44（4）： 1236-1242.（in Chinese）. doi: 10.1016/S0924-8579(07)72025-3

[11] CUI K H, LIU Q, HUANG X J et al. Scanning error detection and compensation algorithm for white-light interferometry[J]. Optics and Lasers in Engineering, 148, 106768(2022).

[12] WU X Z, ZHU L L, FANG F Z et al. Research on the quality control technology of micro-topography machining based on in situ white light interferometry[J]. Measurement, 220, 113257(2023).

[13] [13] 郭立强， 刘恋. 结合斜变换与方差的图像聚焦测度［J］. 光学 精密工程， 2021， 29（7）： 1731-1739. doi: 10.37188/OPE.2020.0555GUOL Q， LIUL. Image focus measure based on slant transform and variance［J］. Opt. Precision Eng.， 2021， 29（7）： 1731-1739.（in Chinese）. doi: 10.37188/OPE.2020.0555