Chinese Journal of Lasers, Volume. 39, Issue s1, 106001(2012)

Variation of Absorptivity with Time of Azo-Material in Absorbption Modulation Micro-Fabrication Technique

Li Da*, Wang Shu, Zhao Xing, Fang Zhiliang, and Yuan Xiaocong
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    References(10)

    [1] [1] Sun Lei, Dai Qingyuan, Qiao Gaoshuai et al.. Trends of lithography technology based on decreasing of the feature size[J]. Micronanoelectronic Technology, 2009, 46(3): 186~190

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    Li Da, Wang Shu, Zhao Xing, Fang Zhiliang, Yuan Xiaocong. Variation of Absorptivity with Time of Azo-Material in Absorbption Modulation Micro-Fabrication Technique[J]. Chinese Journal of Lasers, 2012, 39(s1): 106001

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    Paper Information

    Category: materials and thin films

    Received: Aug. 15, 2011

    Accepted: --

    Published Online: May. 28, 2012

    The Author Email: Da Li (mcneil@live.cn)

    DOI:10.3788/cjl201239.s106001

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