[1] XIA G M, YANG B, WANG S R. Phase correction in digital self-oscillation drive circuit for improve silicon mems gyroscope bias stability[C], 1416-1418(2010).

[2] ZHANG H, CHEN W P, YIN L et al. Design of MEMS gyroscope interface ASIC with on-chip temperature compensation[J]. Measurement, 220, 113331(2023).

[3] BU F, GUO S W, CHENG M M et al. Effect of circuit phase delay on bias stability of MEMS gyroscope under force rebalance detection and self-compensation method[J]. Journal of Micromechanics and Microengineering, 29(2019).

[4] MI J, WANG Q, HAN X T. Low-cost MEMS gyroscope performance improvement under unknown disturbances through deep learning-based array[J]. Sensors and Actuators A： Physical, 368, 115086(2024).

[5] SHEN Q, YANG D F, LI J Y et al. Bias accuracy maintenance under unknown disturbances by multiple homogeneous MEMS gyroscopes fusion[J]. IEEE Transactions on Industrial Electronics, 70, 3178-3187(2023).

[6] WU H B, ZHENG X D, WANG X T et al. Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error[J]. Journal of Micromechanics and Microengineering, 31(2021).

[7] FAN Q, ZHOU Y, LIU M X et al. A MEMS rate-integrating gyroscope （RIG） with In-Run automatic mode-matching[J]. IEEE Sensors Journal, 22, 2282-2291(2022).

[8] REN J B, ZHOU T, ZHOU Y et al. An In-Run automatic mode-matching method with amplitude correction and phase compensation for MEMS disk resonator gyroscope[J]. IEEE Transactions on Instrumentation and Measurement, 72, 7505911(2023).

[9] WANG X T, ZHENG X D, SHEN Y J et al. Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout[J]. Journal of Micromechanics and Microengineering, 33(2023).

[10] JIA J, DING X K, QIN Z C et al. In-Run scale factor compensation for MEMS gyroscope without calibration and fitting[J]. IEEE Sensors Journal, 21, 7316-7325(2021).

[11] YANG C, LI H S. Digital control system for the MEMS tuning fork gyroscope based on synchronous integral demodulator[J]. IEEE Sensors Journal, 15, 5755-5764(2015).

[12] NI Y F, LI H S, HUANG L B et al. On bandwidth characteristics of tuning fork micro-gyroscope with mechanically coupled sense mode[J]. Sensors, 14, 13024-13045(2014).

[13] JIA J, SONG Z Q, GAO Y et al. A low-complexity In-Run modal frequency tuning method for MEMS disk gyroscopes without gain calibration and phase shifting[J]. IEEE Transactions on Instrumentation and Measurement, 73, 7504512(2024).

[14] WANG P, LI Q S, ZHANG Y M et al. Bias thermal stability improvement of mode-matching MEMS gyroscope using mode deflection[J]. Journal of Microelectromechanical Systems, 32, 1-3(2023).

[15] ZHANG H, ZHANG C, CHEN J et al. A review of symmetric silicon MEMS gyroscope mode-matching technologies[J]. Micromachines, 13, 1255(2022).

[16] JIA J, DING X K, GAO Y et al. Demodulation phase angle compensation for quadrature error in decoupled dual-mass MEMS gyroscope[J]. Nanolithography， MEMS， and MOEMS, 17(2018).

[17] ZHAO M, ZHAO Q C, LU W G et al. An interface asic for an atmospheric-pressure mems gyroscope with pll-based phase adjustment and sc amplitude regulation[C], 1-5(2020).

[18] EZEKWE C D, GEIGER W, OHMS T. 27.3 A 3-axis open-loop gyroscope with demodulation phase error correction[C], 1-3(2015).

[19] LIU X W, QIN Z C, LI H S. Online compensation of phase delay error based on P-F characteristic for MEMS vibratory gyroscopes[J]. Micromachines, 13, 647(2022).

[20] BALACHANDRAN G K, PETKOV V P, MAYER T et al. A 3-axis gyroscope for electronic stability control with continuous self-test[C], 177-186(2016).

[21] OMAR A, ELSHENNAWY A, ABDELAZIM M et al. Analyzing the impact of phase errors in quadrature cancellation techniques for mems capacitive gyroscopes[C], 1-4(2018).

[22] LIU M X, FAN Q, ZHAO J et al. A phase compensation method for MEMS quadruple mass gyroscope in zero bias drift[J]. IEEE Sensors Journal, 21, 3087-3096(2021).

[23] PAGANI L G, GUERINONI L, FALORNI L et al. Investigation of gyroscopes mechanical and electronic phase drift with 2 μrad/Hz resolution and 12 μrad/K accuracy[C], 1-4(2020).

[24] TAO Q, TANG B. A high-linearity closed-loop capacitive micro-accelerometer based on ring-diode capacitance detection[J]. Sensors, 23, 1568(2023).

[25] CAO H L[M]. Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope(2023).