Photonics Research, Volume. 9, Issue 9, 1803(2021)

3D printed on-chip microtoroid resonators and nested spiral photonic devices

Hongwei Gao1, George F. R. Chen1, Peng Xing1, Ju Won Choi1, and Dawn T. H. Tan1,2、*
Author Affiliations
  • 1Photonics Devices and Systems Group, Singapore University of Technology and Design, Singapore 487372, Singapore
  • 2Institute of Microelectronics, A*STAR, Singapore 138634, Singapore
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    Figures & Tables(7)
    (a) Schematic and (b) SEM image of the fabricated integrated microtoroid-waveguide system; principal diameter D=88 μm, minor diameter d=8 μm, microtoroid-waveguide gap g=300 nm, size of coupling waveguide W=2 μm, H=2 μm (scale bar is 100 μm). Magnified view of the (c) input and output waveguide coupler (scale bar is 100 μm); (d) microtoroid-waveguide system showing the support pedestals for the coupling waveguide (scale bar is 10 μm), and (e) coupling region between the microtoroid and coupling waveguide (scale bar is 1 μm).
    (a) Transmission spectrum of microtoroid resonator. Major diameter is 80 μm, minor diameter is 8 μm, and gap is 300 nm. (b) Lorentzian fitting of a single resonance at 1545.8 nm; (c) Lorentzian fitting of a single resonance at 1464.1 nm; (d) group index as a function of wavelength.
    (a) Simulated transmission spectrum of microtoroid resonator. The major and minor diameters are 80 μm and 8 μm, respectively, and the gap is 300 nm. (b) Simulated mode profile at 1545.78 nm (on-resonance) and (c) at 1549.3 nm (off-resonance).
    SEM images of coupling region between the microtoroid and coupling waveguide with a gap of (a) 200 nm; (b) 300 nm; and (c) 400 nm; (d) measured transmission spectra of the microtoroid-waveguide with gaps of 200 nm (blue line), 300 nm (red line), and 400 nm (yellow line); (e) simulated transmission spectra of microtoroid-waveguide with gaps of 200 nm (blue line), 300 nm (red line), and 400 nm (yellow line).
    (a) SEM image of nested double-spiral waveguide; scale bar is 100 μm; (b) magnified view of the spiral region; scale bar is 10 μm; (c) input and output waveguide coupler; scale bar is 10 μm; (d) transmission spectrum of the nested double-spiral waveguide.
    High-speed testing setup using 30 Gb/s NRZ data and 28 Gb/s PAM4 data.
    (a) Plot of −log(BER) as a function of received power. Black circles denote the experimentally measured BER for B2B 30 Gb/s NRZ data, whereas the black solid line is the fit to the black circles. Red circles denote the experimentally measured BER for 30 Gb/s NRZ data at the output of the waveguide, and the red line is the fit to the red circles. Blue crosses denote the experimentally measured BER for B2B 28 Gb/s PAM4 data, whereas the blue solid line is the fit to the blue crosses. Green crosses denote the experimentally measured BER for 28 Gb/s PAM4 data at the output of the waveguide, and the green line is the fit to the green crosses. (b) Eye diagram for NRZ; (c) eye diagram for PAM4; (d) experimentally measured BER histogram.
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    Hongwei Gao, George F. R. Chen, Peng Xing, Ju Won Choi, Dawn T. H. Tan, "3D printed on-chip microtoroid resonators and nested spiral photonic devices," Photonics Res. 9, 1803 (2021)

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    Paper Information

    Category: Optical Devices

    Received: May. 5, 2021

    Accepted: Jul. 19, 2021

    Published Online: Aug. 20, 2021

    The Author Email: Dawn T. H. Tan (Dawn_Tan@sutd.edu.sg)

    DOI:10.1364/PRJ.430801

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