Microelectronics, Volume. 55, Issue 1, 9(2025)

Impact of Leakage Degradation Damage Caused by Heavy Ions on the Gate Reliability of SiC MOSFETs

YUAN Qifei1, YU Qingkui1,2, CAO Shuang1,2, SUN Yi1,2, WANG He1, ZHANG Xiao1, ZHANG Teng3, and BAI Song3
Author Affiliations
  • 1China Aerospace Components Engineering Center, Beijing 100029, P. R. China
  • 2National Innovation Center of Radiation Technology, Beijing 100029, P. R. China
  • 3State Key Laboratory of Wide-Bandgap Semiconductor Power Electronic Devices, Nanjing Electronic Devices Institute, Nanjing 211111, P. R. China
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    References(17)

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    [5] [5] MARTINELLA C, RACE S, FR N, et al. Heavy-ion effects in SiC power MOSFETs with trench-gate design[J]. IEEE Transactions on Nuclear Science, 2024, 71(8): 1440-1446.

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    [8] [8] MARTINELLA C, BATHEN M E, JAVANAINEN A, et al. Heavy-ion-induced defects in degraded SiC power MOSFETs[J]. Materials Science Forum, 2023, 1090: 179-184.

    [10] [10] ZHOU X T, PANG H Y, JIA Y P, et al. Gate oxide damage of SiC MOSFETs induced by heavy-ion strike[J]. IEEE Transactions on Electron Devices, 2021, 68(8): 4010-4015.

    [11] [11] Lauenstein J M. Getting SiC power devices off the ground: design, testing, and overcoming radiation threats[C]//Microelectronics Reliability and Qualification Working Meeting (MRQW). El Segundo, CA, USA. 2018: 2018-561-NEPP.

    [12] [12] PENG C, LEI Z F, ZHANG Z G, et al. Influence of drain bias and flux on heavy ion-induced leakage currents in SiC power MOSFETs[J]. IEEE Transactions on Nuclear Science, 2022, 69(5): 1037-1043.

    [13] [13] LIANG X W, ZHAO J H, ZHENG Q W, et al. Impact of heavy-ion irradiation on gate oxide reliability of silicon carbide power MOSFET[J]. Radiation Effects and Defects in Solids, 2021, 176(11-12): 1038-1048.

    [14] [14] NISKANEN K, KETTUNEN H, SDERSTRM D, et al. Proton irradiation-induced reliability degradation of SiC power MOSFET[J]. IEEE Transactions on Nuclear Science, 2023, 70(8): 1838-1843.

    [15] [15] XIAO Y P, LIU C M, ZHANG Y Q, et al. Ionization radiation-induced reliability degradation of SiC power MOSFET[J]. IEEE Transactions on Electron Devices, 2023, 70(12): 6480-6485.

    [16] [16] MARTINELLA C, ZIEMANN T, STARK R, et al. Heavy-ion microbeam studies of single-event leakage current mechanism in SiC VD-MOSFETs[J]. IEEE Transactions on Nuclear Science, 2020, 67(7): 1381-1389.

    [17] [17] KIMOTO T, COOPER J A. Fundamentals of silicon carbide technology: growth, characterization, devices and applications[M]. Wiley-IEEE Press, 2014.

    [18] [18] SUN B T, LEI G Y, ZHANG J. Over dV/dt robustness of switching behavior of SiC MOSFET and a novel main junction region design[J]. IEEE Transactions on Electron Devices, 2024, 71(5): 3109-3115.

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    [20] [20] NAGAHISA Y, HINO S, HATTA H, et al. Novel termination structure eliminating bipolar degradation of SBD-embedded SiC-MOSFET[C]//2020 32nd International Symposium on Power Semiconductor Devices and ICs. Vienna, Austria. 2020: 114-117.

    [21] [21] LI X, TAN B, HUANG A Q, et al. Impact of termination region on switching loss for SiC MOSFET[J]. IEEE Transactions on Electron Devices, 2019, 66(2): 1026-1031.

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    YUAN Qifei, YU Qingkui, CAO Shuang, SUN Yi, WANG He, ZHANG Xiao, ZHANG Teng, BAI Song. Impact of Leakage Degradation Damage Caused by Heavy Ions on the Gate Reliability of SiC MOSFETs[J]. Microelectronics, 2025, 55(1): 9

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    Paper Information

    Special Issue:

    Received: Jul. 15, 2024

    Accepted: Jun. 19, 2025

    Published Online: Jun. 19, 2025

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.240234

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