Microelectronics, Volume. 55, Issue 1, 9(2025)

Impact of Leakage Degradation Damage Caused by Heavy Ions on the Gate Reliability of SiC MOSFETs

YUAN Qifei1, YU Qingkui1,2, CAO Shuang1,2, SUN Yi1,2, WANG He1, ZHANG Xiao1, ZHANG Teng3, and BAI Song3
Author Affiliations
  • 1China Aerospace Components Engineering Center, Beijing 100029, P. R. China
  • 2National Innovation Center of Radiation Technology, Beijing 100029, P. R. China
  • 3State Key Laboratory of Wide-Bandgap Semiconductor Power Electronic Devices, Nanjing Electronic Devices Institute, Nanjing 211111, P. R. China
  • show less

    The study investigated the impact of leakage degradation caused by heavy ions on the gate reliability of 1 200 V SiC MOSFETs. The results showed that under Ta ion irradiation, when VDS was between 150 V and 200 V, the device's leakage current increased from nanoamperes to microamperes. Emission Microscope (EMMI) analysis revealed that the damage was primarily concentrated in the main junction region of the device. After 168 hours of testing at a 20 V gate voltage, the gate leakage current of the degraded device increased from a few microamperes to hundreds of microamperes. However, the maximum transconductance and transfer characteristics did not change significantly. The experiment also confirmed that under negative gate voltage irradiation conditions, the device gate was more susceptible to leakage. In summary, this study provides new insights into the evaluation of gate reliability and the enhancement of radiation hardness for SiC MOSFETs after irradiation, offering valuable perspectives for simulating heavy ion single-particle effects relevant to both space and ground environments.

    Tools

    Get Citation

    Copy Citation Text

    YUAN Qifei, YU Qingkui, CAO Shuang, SUN Yi, WANG He, ZHANG Xiao, ZHANG Teng, BAI Song. Impact of Leakage Degradation Damage Caused by Heavy Ions on the Gate Reliability of SiC MOSFETs[J]. Microelectronics, 2025, 55(1): 9

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Special Issue:

    Received: Jul. 15, 2024

    Accepted: Jun. 19, 2025

    Published Online: Jun. 19, 2025

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.240234

    Topics