Chinese Optics Letters, Volume. 8, Issue s1, 87(2010)

Investigation on initial oxidation kinetics of Al, Ni, and Hf metal film surfaces

Shigeng Song and Frank Placido
Author Affiliations
  • Thin Film Centre, University of the West of Scotland, Paisley, Scotland PA1 2BE, England
  • show less
    References(13)

    [1] [1] I. Banerjee, J. Electrochem. Soc. 140, 501 (1993).

    [2] [2] C. M. Wang, D. R. Baer, J. E. Amonette, M. H. Engelhard, J. J. Antony, and Y. Qiang, Micorsc. Microanal 12, 546 (2006).

    [3] [3] S. A. Campbell, The Sctence and Engineering of Microelectronic Fabrication (Oxford University Press, London, 1996).

    [4] [4] H. Z. Massoud, J. D. Plummer, and E. A. Irene, J. Electrochem. Soc. 132, 2693 (1985).

    [5] [5] N. Cabrera and N. Mott, Rept. Prog. Phys. 12, 163 (1984).

    [6] [6] V. P. Parkhuttik, J. Phys. D: Appl. Phys 25, 256 (1992).

    [7] [7] V. P. Zhdanov and B Kasemo, Chem. Phys. Lett. 452, 285 (2008).

    [8] [8] A. M. Lopez-Beltran and A. Mendoza-Galvan, Thin Solid Film 503, 40 (2006).

    [9] [9] S. Moh and F. Placido, in Proceedings of 47th Annual Technical Conference Proceedings of the Society of Vacuum Coaters 443 (2004).

    [10] [10] F. Placido and A. Voronov, in Proceedings of the 45th Annual Technical Conference of the Society of Vacuum Coaters 266 (2002).

    [11] [11] J. R. Davis, Heat-resistant materials (ASM International, New York, 1997)

    [12] [12] J. C. Yang, M. D. Bharadwaj, G. Zhou, and L. Tropia, Microsc. Microanal. 7, 486 (2001).

    [13] [13] D. N. Blauch, “Chemical Kinetics, Integrated Rate Laws” http:// www.chm. davidson.edu/ vce/kinetics /IntegratedRateLaws.html (December 1, 2009)

    Cited By
    Tools

    Get Citation

    Copy Citation Text

    Shigeng Song, Frank Placido, "Investigation on initial oxidation kinetics of Al, Ni, and Hf metal film surfaces," Chin. Opt. Lett. 8, 87 (2010)

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Oct. 27, 2009

    Accepted: --

    Published Online: May. 14, 2010

    The Author Email:

    DOI:10.3788/COL201008s1.0087

    Topics